JPS5035518Y2 - - Google Patents

Info

Publication number
JPS5035518Y2
JPS5035518Y2 JP6184771U JP6184771U JPS5035518Y2 JP S5035518 Y2 JPS5035518 Y2 JP S5035518Y2 JP 6184771 U JP6184771 U JP 6184771U JP 6184771 U JP6184771 U JP 6184771U JP S5035518 Y2 JPS5035518 Y2 JP S5035518Y2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6184771U
Other languages
Japanese (ja)
Other versions
JPS4817890U (en, 2012
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6184771U priority Critical patent/JPS5035518Y2/ja
Publication of JPS4817890U publication Critical patent/JPS4817890U/ja
Application granted granted Critical
Publication of JPS5035518Y2 publication Critical patent/JPS5035518Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Screw Conveyors (AREA)
JP6184771U 1971-07-13 1971-07-13 Expired JPS5035518Y2 (en, 2012)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6184771U JPS5035518Y2 (en, 2012) 1971-07-13 1971-07-13

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6184771U JPS5035518Y2 (en, 2012) 1971-07-13 1971-07-13

Publications (2)

Publication Number Publication Date
JPS4817890U JPS4817890U (en, 2012) 1973-02-28
JPS5035518Y2 true JPS5035518Y2 (en, 2012) 1975-10-16

Family

ID=27951612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6184771U Expired JPS5035518Y2 (en, 2012) 1971-07-13 1971-07-13

Country Status (1)

Country Link
JP (1) JPS5035518Y2 (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4968356U (en, 2012) * 1972-09-30 1974-06-14
JPS5331726Y2 (en, 2012) * 1974-02-19 1978-08-07
JPS5281045U (en, 2012) * 1975-12-13 1977-06-16
CN110622276B (zh) 2017-04-11 2022-07-08 Asml荷兰有限公司 带电粒子源模块

Also Published As

Publication number Publication date
JPS4817890U (en, 2012) 1973-02-28

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