JPS5034861A - - Google Patents
Info
- Publication number
- JPS5034861A JPS5034861A JP8573673A JP8573673A JPS5034861A JP S5034861 A JPS5034861 A JP S5034861A JP 8573673 A JP8573673 A JP 8573673A JP 8573673 A JP8573673 A JP 8573673A JP S5034861 A JPS5034861 A JP S5034861A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8573673A JPS5034861A (ja) | 1973-07-30 | 1973-07-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8573673A JPS5034861A (ja) | 1973-07-30 | 1973-07-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5034861A true JPS5034861A (ja) | 1975-04-03 |
Family
ID=13867114
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8573673A Pending JPS5034861A (ja) | 1973-07-30 | 1973-07-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5034861A (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58159883A (ja) * | 1981-12-09 | 1983-09-22 | アクテイエボラ−グ・ケルバ | 粒状物を除いてウエブを清掃する方法と装置 |
-
1973
- 1973-07-30 JP JP8573673A patent/JPS5034861A/ja active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58159883A (ja) * | 1981-12-09 | 1983-09-22 | アクテイエボラ−グ・ケルバ | 粒状物を除いてウエブを清掃する方法と装置 |
| JPH0418915B2 (ja) * | 1981-12-09 | 1992-03-30 | Keruba Ab |