JPS5034848A - - Google Patents

Info

Publication number
JPS5034848A
JPS5034848A JP49079039A JP7903974A JPS5034848A JP S5034848 A JPS5034848 A JP S5034848A JP 49079039 A JP49079039 A JP 49079039A JP 7903974 A JP7903974 A JP 7903974A JP S5034848 A JPS5034848 A JP S5034848A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP49079039A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5034848A publication Critical patent/JPS5034848A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F9/00—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically
    • G03F9/70—Registration or positioning of originals, masks, frames, photographic sheets or textured or patterned surfaces, e.g. automatically for microlithography

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
JP49079039A 1973-07-11 1974-07-10 Pending JPS5034848A (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19732335227 DE2335227A1 (de) 1973-07-11 1973-07-11 Verfahren zur ausrichtung der winkellage eines werkstueckes mit optisch erfassbaren strukturen relativ zu einer bezugsrichtung sowie einrichtungen zu dessen durchfuehrung

Publications (1)

Publication Number Publication Date
JPS5034848A true JPS5034848A (ja) 1975-04-03

Family

ID=5886555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP49079039A Pending JPS5034848A (ja) 1973-07-11 1974-07-10

Country Status (4)

Country Link
US (1) US3953133A (ja)
JP (1) JPS5034848A (ja)
DE (1) DE2335227A1 (ja)
GB (1) GB1468545A (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298302A (en) * 1976-02-16 1977-08-18 Kiyokutou Kougen Konkuriito Sh Method of installing starting apparatus for contruction to tracted underground
JPS5651890U (ja) * 1980-09-18 1981-05-08

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4397559A (en) * 1981-02-19 1983-08-09 University Of Pittsburgh Apparatus for processing electromagnetic radiation and method
DE3213145A1 (de) * 1982-04-08 1983-10-20 Fa. Carl Zeiss, 7920 Heidenheim Mikroskopphotometer
US4780961A (en) * 1986-11-10 1988-11-01 Shelton Russell S Probe assembly and circuit for measuring machine
US4790642A (en) * 1986-12-01 1988-12-13 Gca Corporation/Tropel Division Integrated metrology for microlithographic objective reducing lens
US4847511A (en) * 1987-08-27 1989-07-11 Chuo Precision Industrial Co., Ltd. Device for measuring rectilinear motion
US5341213A (en) * 1992-07-21 1994-08-23 Avco Corporation Alignment of radiation receptor with lens by Fourier optics
CN112066914B (zh) * 2020-08-14 2021-12-21 常州机电职业技术学院 基于机器视觉的3362电位器机械角度复位系统及复位方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3533702A (en) * 1965-04-24 1970-10-13 Leitz Ernst Gmbh Multipurpose optical measuring device for determining the position of an object in two coordinates
US3683195A (en) * 1971-03-22 1972-08-08 Kasper Instruments Apparatus for the automatic alignment of two superimposed objects,e.g. a semiconductor wafer and mask
DE2210681C3 (de) * 1972-03-06 1980-09-18 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Einrichtung zur berührungslosen Messung

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5298302A (en) * 1976-02-16 1977-08-18 Kiyokutou Kougen Konkuriito Sh Method of installing starting apparatus for contruction to tracted underground
JPS5651890U (ja) * 1980-09-18 1981-05-08

Also Published As

Publication number Publication date
DE2335227A1 (de) 1975-01-30
GB1468545A (en) 1977-03-30
US3953133A (en) 1976-04-27

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