JPS5032923A - - Google Patents

Info

Publication number
JPS5032923A
JPS5032923A JP8284873A JP8284873A JPS5032923A JP S5032923 A JPS5032923 A JP S5032923A JP 8284873 A JP8284873 A JP 8284873A JP 8284873 A JP8284873 A JP 8284873A JP S5032923 A JPS5032923 A JP S5032923A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8284873A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP8284873A priority Critical patent/JPS5032923A/ja
Priority to DE2435389A priority patent/DE2435389A1/de
Publication of JPS5032923A publication Critical patent/JPS5032923A/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/008—Azides
    • G03F7/012—Macromolecular azides; Macromolecular additives, e.g. binders
    • G03F7/0125—Macromolecular azides; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the macromolecular azides

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Polymerisation Methods In General (AREA)
JP8284873A 1973-07-23 1973-07-23 Pending JPS5032923A (enrdf_load_stackoverflow)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP8284873A JPS5032923A (enrdf_load_stackoverflow) 1973-07-23 1973-07-23
DE2435389A DE2435389A1 (de) 1973-07-23 1974-07-23 Lichtempfindliche beschichtungsmasse

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8284873A JPS5032923A (enrdf_load_stackoverflow) 1973-07-23 1973-07-23

Publications (1)

Publication Number Publication Date
JPS5032923A true JPS5032923A (enrdf_load_stackoverflow) 1975-03-29

Family

ID=13785790

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8284873A Pending JPS5032923A (enrdf_load_stackoverflow) 1973-07-23 1973-07-23

Country Status (2)

Country Link
JP (1) JPS5032923A (enrdf_load_stackoverflow)
DE (1) DE2435389A1 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03271744A (ja) * 1990-03-22 1991-12-03 Chisso Corp 光硬化性樹脂組成物

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2948324C2 (de) * 1978-12-01 1993-01-14 Hitachi, Ltd., Tokio/Tokyo Lichtempfindliches Gemisch, enthaltend eine Bisazidverbindung, und Verfahren zur Bildung von Mustern
JPS5660431A (en) * 1979-10-24 1981-05-25 Hitachi Ltd Photosensitive composition and pattern forming method
JPS56137347A (en) * 1980-03-29 1981-10-27 Tokyo Ohka Kogyo Co Ltd Photosensitive composition for dry development
US4980264A (en) * 1985-12-17 1990-12-25 International Business Machines Corporation Photoresist compositions of controlled dissolution rate in alkaline developers
CN1094604C (zh) * 1993-12-27 2002-11-20 克拉瑞特金融(Bvi)有限公司 着色感光性树脂组合物

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03271744A (ja) * 1990-03-22 1991-12-03 Chisso Corp 光硬化性樹脂組成物

Also Published As

Publication number Publication date
DE2435389A1 (de) 1975-02-13

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