JPS5031852A - - Google Patents
Info
- Publication number
- JPS5031852A JPS5031852A JP8060573A JP8060573A JPS5031852A JP S5031852 A JPS5031852 A JP S5031852A JP 8060573 A JP8060573 A JP 8060573A JP 8060573 A JP8060573 A JP 8060573A JP S5031852 A JPS5031852 A JP S5031852A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8060573A JPS5031852A (en) | 1973-07-20 | 1973-07-20 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8060573A JPS5031852A (en) | 1973-07-20 | 1973-07-20 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS5031852A true JPS5031852A (en) | 1975-03-28 |
Family
ID=13722948
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8060573A Pending JPS5031852A (en) | 1973-07-20 | 1973-07-20 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5031852A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05248825A (en) * | 1991-12-06 | 1993-09-28 | Hughes Aircraft Co | Equipment for measuring thickness of thin film |
JPH0666524A (en) * | 1992-06-29 | 1994-03-08 | Hughes Aircraft Co | Device and method for metrologically processing thickness of thin film layer on thin film layer having deformed shaped and prtially deformed inclination |
-
1973
- 1973-07-20 JP JP8060573A patent/JPS5031852A/ja active Pending
Non-Patent Citations (1)
Title |
---|
REVIEW SCIENTIFIC INSTRUMENTS=1967 * |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05248825A (en) * | 1991-12-06 | 1993-09-28 | Hughes Aircraft Co | Equipment for measuring thickness of thin film |
JPH0666524A (en) * | 1992-06-29 | 1994-03-08 | Hughes Aircraft Co | Device and method for metrologically processing thickness of thin film layer on thin film layer having deformed shaped and prtially deformed inclination |