JPS5030100A - - Google Patents
Info
- Publication number
- JPS5030100A JPS5030100A JP48081824A JP8182473A JPS5030100A JP S5030100 A JPS5030100 A JP S5030100A JP 48081824 A JP48081824 A JP 48081824A JP 8182473 A JP8182473 A JP 8182473A JP S5030100 A JPS5030100 A JP S5030100A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8182473A JPS5630716B2 (ja) | 1973-07-20 | 1973-07-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8182473A JPS5630716B2 (ja) | 1973-07-20 | 1973-07-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5030100A true JPS5030100A (ja) | 1975-03-26 |
| JPS5630716B2 JPS5630716B2 (ja) | 1981-07-16 |
Family
ID=13757219
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8182473A Expired JPS5630716B2 (ja) | 1973-07-20 | 1973-07-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5630716B2 (ja) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58141020A (ja) * | 1982-02-15 | 1983-08-22 | Seiko Instr & Electronics Ltd | 結合振動子ウェハの周波数調整方法 |
| US6787048B2 (en) * | 2001-03-05 | 2004-09-07 | Agilent Technologies, Inc. | Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method |
| JP2011010204A (ja) * | 2009-06-29 | 2011-01-13 | Nippon Dempa Kogyo Co Ltd | 水晶片の製造方法及びこの方法により製造した水晶振動子 |
-
1973
- 1973-07-20 JP JP8182473A patent/JPS5630716B2/ja not_active Expired
Non-Patent Citations (1)
| Title |
|---|
| THE PROCEEDINGS OF THE IEEE#V104#M5=1957 * |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58141020A (ja) * | 1982-02-15 | 1983-08-22 | Seiko Instr & Electronics Ltd | 結合振動子ウェハの周波数調整方法 |
| US6787048B2 (en) * | 2001-03-05 | 2004-09-07 | Agilent Technologies, Inc. | Method for producing thin bulk acoustic resonators (FBARs) with different frequencies on the same substrate by subtracting method and apparatus embodying the method |
| JP2011010204A (ja) * | 2009-06-29 | 2011-01-13 | Nippon Dempa Kogyo Co Ltd | 水晶片の製造方法及びこの方法により製造した水晶振動子 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5630716B2 (ja) | 1981-07-16 |