JPS5029310B1 - - Google Patents

Info

Publication number
JPS5029310B1
JPS5029310B1 JP45069762A JP6976270A JPS5029310B1 JP S5029310 B1 JPS5029310 B1 JP S5029310B1 JP 45069762 A JP45069762 A JP 45069762A JP 6976270 A JP6976270 A JP 6976270A JP S5029310 B1 JPS5029310 B1 JP S5029310B1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP45069762A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPS5029310B1 publication Critical patent/JPS5029310B1/ja
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/27—Control of temperature characterised by the use of electric means with sensing element responsive to radiation
    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D23/00—Control of temperature
    • G05D23/19—Control of temperature characterised by the use of electric means
    • G05D23/1917—Control of temperature characterised by the use of electric means using digital means
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/06—Control, e.g. of temperature, of power
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
    • H05B6/00—Heating by electric, magnetic or electromagnetic fields
    • H05B6/02—Induction heating
    • H05B6/10—Induction heating apparatus, other than furnaces, for specific applications

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Radiation Pyrometers (AREA)
  • Control Of Temperature (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP45069762A 1969-08-11 1970-08-11 Pending JPS5029310B1 (ja)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84902969A 1969-08-11 1969-08-11

Publications (1)

Publication Number Publication Date
JPS5029310B1 true JPS5029310B1 (ja) 1975-09-22

Family

ID=25304892

Family Applications (1)

Application Number Title Priority Date Filing Date
JP45069762A Pending JPS5029310B1 (ja) 1969-08-11 1970-08-11

Country Status (6)

Country Link
US (1) US3567895A (ja)
JP (1) JPS5029310B1 (ja)
CA (1) CA936266A (ja)
DE (1) DE2036247A1 (ja)
FR (1) FR2056463A5 (ja)
GB (1) GB1298497A (ja)

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5316939A (en) * 1976-07-30 1978-02-16 Nippon Steel Corp Inducton heating method
DK142586B (da) * 1977-07-07 1980-11-24 Topsil As Apparat til zonesmeltning af en halvlederstav.
US5288364A (en) * 1992-08-20 1994-02-22 Motorola, Inc. Silicon epitaxial reactor and control method
EP0731906A1 (en) * 1994-10-03 1996-09-18 York Sensors Limited Monitoring wall temperatures of reactor vessels
US5811792A (en) * 1997-01-02 1998-09-22 Wisconsin Label Corporation Method and apparatus for accessing contents of envelopes and other similarly concealed information
US6063234A (en) * 1997-09-10 2000-05-16 Lam Research Corporation Temperature sensing system for use in a radio frequency environment
US6473708B1 (en) * 1999-12-20 2002-10-29 Bechtel Bwxt Idaho, Llc Device and method for self-verifying temperature measurement and control
US6555363B1 (en) * 2000-06-05 2003-04-29 Gary Dean Roberts Aerobic reduction reactor
US7006900B2 (en) * 2002-11-14 2006-02-28 Asm International N.V. Hybrid cascade model-based predictive control system
WO2004053946A2 (en) * 2002-12-09 2004-06-24 Koninklijke Philips Electronics N.V. System and method for suppression of wafer temperature drift in cold-wall cvd system
US20090032085A1 (en) * 2004-06-18 2009-02-05 Mihai Grumazescu Apparatus for generating ac electric power from photovoltaic cells
JP5017950B2 (ja) * 2005-09-21 2012-09-05 株式会社Ｓｕｍｃｏ エピタキシャル成長装置の温度管理方法
JP6496406B2 (ja) * 2014-10-03 2019-04-03 ヒューレット−パッカード デベロップメント カンパニー エル．ピー．Ｈｅｗｌｅｔｔ‐Ｐａｃｋａｒｄ Ｄｅｖｅｌｏｐｍｅｎｔ Ｃｏｍｐａｎｙ， Ｌ．Ｐ． 表面の加熱制御
CN116892020B (zh) * 2023-08-30 2025-08-19 宿州顺风光电科技有限公司 一种镀膜工艺的温控系统

Also Published As

Publication number Publication date
US3567895A (en) 1971-03-02
CA936266A (en) 1973-10-30
FR2056463A5 (ja) 1971-05-14
DE2036247A1 (de) 1971-02-25
GB1298497A (en) 1972-12-06

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