JPS5029166A - - Google Patents
Info
- Publication number
- JPS5029166A JPS5029166A JP7991373A JP7991373A JPS5029166A JP S5029166 A JPS5029166 A JP S5029166A JP 7991373 A JP7991373 A JP 7991373A JP 7991373 A JP7991373 A JP 7991373A JP S5029166 A JPS5029166 A JP S5029166A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7991373A JPS5029166A (enrdf_load_stackoverflow) | 1973-07-17 | 1973-07-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7991373A JPS5029166A (enrdf_load_stackoverflow) | 1973-07-17 | 1973-07-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5029166A true JPS5029166A (enrdf_load_stackoverflow) | 1975-03-25 |
Family
ID=13703515
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7991373A Pending JPS5029166A (enrdf_load_stackoverflow) | 1973-07-17 | 1973-07-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5029166A (enrdf_load_stackoverflow) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55151339A (en) * | 1979-05-16 | 1980-11-25 | Mitsubishi Electric Corp | Quartz tube for heat treatment |
| JPS5633838A (en) * | 1979-08-29 | 1981-04-04 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device and reaction tube or jig used for manufacture |
| JPS61123132A (ja) * | 1985-10-21 | 1986-06-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | ウエ−ハ加熱処理用具 |
| US6503362B1 (en) | 1992-09-29 | 2003-01-07 | Boehringer Ingelheim International Gmbh | Atomizing nozzle an filter and spray generating device |
| US6846413B1 (en) | 1997-09-26 | 2005-01-25 | Boehringer Ingelheim International Gmbh | Microstructured filter |
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1973
- 1973-07-17 JP JP7991373A patent/JPS5029166A/ja active Pending
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS55151339A (en) * | 1979-05-16 | 1980-11-25 | Mitsubishi Electric Corp | Quartz tube for heat treatment |
| JPS5633838A (en) * | 1979-08-29 | 1981-04-04 | Chiyou Lsi Gijutsu Kenkyu Kumiai | Manufacture of semiconductor device and reaction tube or jig used for manufacture |
| JPS61123132A (ja) * | 1985-10-21 | 1986-06-11 | Chiyou Lsi Gijutsu Kenkyu Kumiai | ウエ−ハ加熱処理用具 |
| US6503362B1 (en) | 1992-09-29 | 2003-01-07 | Boehringer Ingelheim International Gmbh | Atomizing nozzle an filter and spray generating device |
| US7246615B2 (en) | 1992-09-29 | 2007-07-24 | Boehringer International Gmbh | Atomising nozzle and filter and spray generating device |
| US6846413B1 (en) | 1997-09-26 | 2005-01-25 | Boehringer Ingelheim International Gmbh | Microstructured filter |
| US6977042B2 (en) | 1997-09-26 | 2005-12-20 | Klaus Kadel | Microstructured filter |
| US7645383B2 (en) | 1997-09-26 | 2010-01-12 | Boehringer Ingelheim International Gmbh | Microstructured filter |