JPS502881A - - Google Patents
Info
- Publication number
- JPS502881A JPS502881A JP5142373A JP5142373A JPS502881A JP S502881 A JPS502881 A JP S502881A JP 5142373 A JP5142373 A JP 5142373A JP 5142373 A JP5142373 A JP 5142373A JP S502881 A JPS502881 A JP S502881A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Element Separation (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5142373A JPS545955B2 (ko) | 1973-05-09 | 1973-05-09 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5142373A JPS545955B2 (ko) | 1973-05-09 | 1973-05-09 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS502881A true JPS502881A (ko) | 1975-01-13 |
| JPS545955B2 JPS545955B2 (ko) | 1979-03-23 |
Family
ID=12886505
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5142373A Expired JPS545955B2 (ko) | 1973-05-09 | 1973-05-09 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS545955B2 (ko) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5370687A (en) * | 1976-12-07 | 1978-06-23 | Toshiba Corp | Production of semiconductor device |
| JPS592346A (ja) * | 1982-06-28 | 1984-01-07 | Semiconductor Res Found | 半導体集積回路 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0249455U (ko) * | 1988-09-30 | 1990-04-05 |
-
1973
- 1973-05-09 JP JP5142373A patent/JPS545955B2/ja not_active Expired
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5370687A (en) * | 1976-12-07 | 1978-06-23 | Toshiba Corp | Production of semiconductor device |
| JPS5625021B2 (ko) * | 1976-12-07 | 1981-06-10 | ||
| JPS592346A (ja) * | 1982-06-28 | 1984-01-07 | Semiconductor Res Found | 半導体集積回路 |
| JPH0427706B2 (ko) * | 1982-06-28 | 1992-05-12 | Handotai Kenkyu Shinkokai |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS545955B2 (ko) | 1979-03-23 |