JPS502881A - - Google Patents

Info

Publication number
JPS502881A
JPS502881A JP5142373A JP5142373A JPS502881A JP S502881 A JPS502881 A JP S502881A JP 5142373 A JP5142373 A JP 5142373A JP 5142373 A JP5142373 A JP 5142373A JP S502881 A JPS502881 A JP S502881A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5142373A
Other languages
Japanese (ja)
Other versions
JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5142373A priority Critical patent/JPS545955B2/ja
Publication of JPS502881A publication Critical patent/JPS502881A/ja
Publication of JPS545955B2 publication Critical patent/JPS545955B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Element Separation (AREA)
JP5142373A 1973-05-09 1973-05-09 Expired JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5142373A JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-05-09 1973-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5142373A JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-05-09 1973-05-09

Publications (2)

Publication Number Publication Date
JPS502881A true JPS502881A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-01-13
JPS545955B2 JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-23

Family

ID=12886505

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5142373A Expired JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1973-05-09 1973-05-09

Country Status (1)

Country Link
JP (1) JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5370687A (en) * 1976-12-07 1978-06-23 Toshiba Corp Production of semiconductor device
JPS592346A (ja) * 1982-06-28 1984-01-07 Semiconductor Res Found 半導体集積回路

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0249455U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1988-09-30 1990-04-05

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5370687A (en) * 1976-12-07 1978-06-23 Toshiba Corp Production of semiconductor device
JPS592346A (ja) * 1982-06-28 1984-01-07 Semiconductor Res Found 半導体集積回路

Also Published As

Publication number Publication date
JPS545955B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1979-03-23

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