JPS502867A - - Google Patents

Info

Publication number
JPS502867A
JPS502867A JP5183573A JP5183573A JPS502867A JP S502867 A JPS502867 A JP S502867A JP 5183573 A JP5183573 A JP 5183573A JP 5183573 A JP5183573 A JP 5183573A JP S502867 A JPS502867 A JP S502867A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5183573A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5183573A priority Critical patent/JPS502867A/ja
Publication of JPS502867A publication Critical patent/JPS502867A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP5183573A 1973-05-09 1973-05-09 Pending JPS502867A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5183573A JPS502867A (en) 1973-05-09 1973-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5183573A JPS502867A (en) 1973-05-09 1973-05-09

Publications (1)

Publication Number Publication Date
JPS502867A true JPS502867A (en) 1975-01-13

Family

ID=12897905

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5183573A Pending JPS502867A (en) 1973-05-09 1973-05-09

Country Status (1)

Country Link
JP (1) JPS502867A (en)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147180A (en) * 1975-06-12 1976-12-17 Fujitsu Ltd Method of manufacturing of semiconductor device
JPS5285030A (en) * 1976-01-09 1977-07-15 Nippon Kokan Kk High resistant electroozinc plated steel plate and production method thereof
JPS5643156U (en) * 1979-09-12 1981-04-20
JPS5647590A (en) * 1979-09-25 1981-04-30 Whyco Chromium Co Lower portion cladding and corrosion resistance improvement method thereby
US4439283A (en) * 1982-01-29 1984-03-27 Omi International Corporation Zinc cobalt alloy plating
JPS5994825A (en) * 1982-11-24 1984-05-31 Nec Corp Alignment method for semiconductor wafer
JPS62247372A (en) * 1987-02-06 1987-10-28 Hitachi Ltd Method for reduced projection exposure
JPH0338820A (en) * 1989-07-05 1991-02-19 Seiko Instr Inc Manufacture of semiconductor device

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51147180A (en) * 1975-06-12 1976-12-17 Fujitsu Ltd Method of manufacturing of semiconductor device
JPS5285030A (en) * 1976-01-09 1977-07-15 Nippon Kokan Kk High resistant electroozinc plated steel plate and production method thereof
JPS5644959B2 (en) * 1976-01-09 1981-10-22
JPS5643156U (en) * 1979-09-12 1981-04-20
JPS5647590A (en) * 1979-09-25 1981-04-30 Whyco Chromium Co Lower portion cladding and corrosion resistance improvement method thereby
US4439283A (en) * 1982-01-29 1984-03-27 Omi International Corporation Zinc cobalt alloy plating
JPS5994825A (en) * 1982-11-24 1984-05-31 Nec Corp Alignment method for semiconductor wafer
JPS62247372A (en) * 1987-02-06 1987-10-28 Hitachi Ltd Method for reduced projection exposure
JPS6341050B2 (en) * 1987-02-06 1988-08-15 Hitachi Ltd
JPH0338820A (en) * 1989-07-05 1991-02-19 Seiko Instr Inc Manufacture of semiconductor device

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