JPS5027782A - - Google Patents

Info

Publication number
JPS5027782A
JPS5027782A JP7893773A JP7893773A JPS5027782A JP S5027782 A JPS5027782 A JP S5027782A JP 7893773 A JP7893773 A JP 7893773A JP 7893773 A JP7893773 A JP 7893773A JP S5027782 A JPS5027782 A JP S5027782A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7893773A
Other languages
Japanese (ja)
Other versions
JPS5224515B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48078937A priority Critical patent/JPS5224515B2/ja
Publication of JPS5027782A publication Critical patent/JPS5027782A/ja
Publication of JPS5224515B2 publication Critical patent/JPS5224515B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP48078937A 1973-07-14 1973-07-14 Expired JPS5224515B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48078937A JPS5224515B2 (enrdf_load_stackoverflow) 1973-07-14 1973-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48078937A JPS5224515B2 (enrdf_load_stackoverflow) 1973-07-14 1973-07-14

Publications (2)

Publication Number Publication Date
JPS5027782A true JPS5027782A (enrdf_load_stackoverflow) 1975-03-22
JPS5224515B2 JPS5224515B2 (enrdf_load_stackoverflow) 1977-07-01

Family

ID=13675780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48078937A Expired JPS5224515B2 (enrdf_load_stackoverflow) 1973-07-14 1973-07-14

Country Status (1)

Country Link
JP (1) JPS5224515B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133369A (ja) * 1983-01-21 1984-07-31 Hitachi Ltd スパツタリング用のタ−ゲツト構造体
JPS61166964A (ja) * 1985-01-18 1986-07-28 Tokuda Seisakusho Ltd スパツタリング用タ−ゲツト
JP2003027227A (ja) * 2001-07-23 2003-01-29 Dainippon Printing Co Ltd スパッタリング用ターゲット

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02125538U (enrdf_load_stackoverflow) * 1989-02-10 1990-10-16

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940682U (enrdf_load_stackoverflow) * 1972-07-13 1974-04-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940682U (enrdf_load_stackoverflow) * 1972-07-13 1974-04-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133369A (ja) * 1983-01-21 1984-07-31 Hitachi Ltd スパツタリング用のタ−ゲツト構造体
JPS61166964A (ja) * 1985-01-18 1986-07-28 Tokuda Seisakusho Ltd スパツタリング用タ−ゲツト
JP2003027227A (ja) * 2001-07-23 2003-01-29 Dainippon Printing Co Ltd スパッタリング用ターゲット

Also Published As

Publication number Publication date
JPS5224515B2 (enrdf_load_stackoverflow) 1977-07-01

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