JPS5027782A - - Google Patents

Info

Publication number
JPS5027782A
JPS5027782A JP7893773A JP7893773A JPS5027782A JP S5027782 A JPS5027782 A JP S5027782A JP 7893773 A JP7893773 A JP 7893773A JP 7893773 A JP7893773 A JP 7893773A JP S5027782 A JPS5027782 A JP S5027782A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7893773A
Other languages
Japanese (ja)
Other versions
JPS5224515B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48078937A priority Critical patent/JPS5224515B2/ja
Publication of JPS5027782A publication Critical patent/JPS5027782A/ja
Publication of JPS5224515B2 publication Critical patent/JPS5224515B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP48078937A 1973-07-14 1973-07-14 Expired JPS5224515B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48078937A JPS5224515B2 (cs) 1973-07-14 1973-07-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48078937A JPS5224515B2 (cs) 1973-07-14 1973-07-14

Publications (2)

Publication Number Publication Date
JPS5027782A true JPS5027782A (cs) 1975-03-22
JPS5224515B2 JPS5224515B2 (cs) 1977-07-01

Family

ID=13675780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48078937A Expired JPS5224515B2 (cs) 1973-07-14 1973-07-14

Country Status (1)

Country Link
JP (1) JPS5224515B2 (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133369A (ja) * 1983-01-21 1984-07-31 Hitachi Ltd スパツタリング用のタ−ゲツト構造体
JPS61166964A (ja) * 1985-01-18 1986-07-28 Tokuda Seisakusho Ltd スパツタリング用タ−ゲツト
JP2003027227A (ja) * 2001-07-23 2003-01-29 Dainippon Printing Co Ltd スパッタリング用ターゲット

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02125538U (cs) * 1989-02-10 1990-10-16

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940682U (cs) * 1972-07-13 1974-04-10

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4940682U (cs) * 1972-07-13 1974-04-10

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59133369A (ja) * 1983-01-21 1984-07-31 Hitachi Ltd スパツタリング用のタ−ゲツト構造体
JPS61166964A (ja) * 1985-01-18 1986-07-28 Tokuda Seisakusho Ltd スパツタリング用タ−ゲツト
JP2003027227A (ja) * 2001-07-23 2003-01-29 Dainippon Printing Co Ltd スパッタリング用ターゲット

Also Published As

Publication number Publication date
JPS5224515B2 (cs) 1977-07-01

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