JPS5027402B2 - - Google Patents

Info

Publication number
JPS5027402B2
JPS5027402B2 JP2546072A JP2546072A JPS5027402B2 JP S5027402 B2 JPS5027402 B2 JP S5027402B2 JP 2546072 A JP2546072 A JP 2546072A JP 2546072 A JP2546072 A JP 2546072A JP S5027402 B2 JPS5027402 B2 JP S5027402B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP2546072A
Other languages
Japanese (ja)
Other versions
JPS4893401A (US06724976-20040420-M00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP2546072A priority Critical patent/JPS5027402B2/ja
Priority to IT4872673A priority patent/IT982883B/it
Priority to FR7308853A priority patent/FR2175955B1/fr
Priority to DE2312496A priority patent/DE2312496C2/de
Priority to CH360773A priority patent/CH563026A5/xx
Priority to GB1207773A priority patent/GB1424817A/en
Publication of JPS4893401A publication Critical patent/JPS4893401A/ja
Publication of JPS5027402B2 publication Critical patent/JPS5027402B2/ja
Expired legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54Absorbers, e.g. of opaque materials
    • G03F1/56Organic absorbers, e.g. of photo-resists
    • GPHYSICS
    • G03PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03FPHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004Photosensitive materials
    • G03F7/016Diazonium salts or compounds
    • G03F7/021Macromolecular diazonium compounds; Macromolecular additives, e.g. binders
    • G03F7/0212Macromolecular diazonium compounds; Macromolecular additives, e.g. binders characterised by the polymeric binder or the macromolecular additives other than the diazo resins or the polymeric diazonium compounds
    • G03F7/0215Natural gums; Proteins, e.g. gelatins; Macromolecular carbohydrates, e.g. cellulose; Polyvinyl alcohol and derivatives thereof, e.g. polyvinylacetals

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Molecular Biology (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
JP2546072A 1972-03-13 1972-03-13 Expired JPS5027402B2 (US06724976-20040420-M00002.png)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2546072A JPS5027402B2 (US06724976-20040420-M00002.png) 1972-03-13 1972-03-13
IT4872673A IT982883B (it) 1972-03-13 1973-03-12 Elemento fotosensibile e procedi mento per fabbricare negative a finestra aperta
FR7308853A FR2175955B1 (US06724976-20040420-M00002.png) 1972-03-13 1973-03-13
DE2312496A DE2312496C2 (de) 1972-03-13 1973-03-13 Verfahren zur Herstellung von leicht abschälbaren Negativdruckvorlagen
CH360773A CH563026A5 (US06724976-20040420-M00002.png) 1972-03-13 1973-03-13
GB1207773A GB1424817A (en) 1972-03-13 1973-03-13 Photosensitive elements

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2546072A JPS5027402B2 (US06724976-20040420-M00002.png) 1972-03-13 1972-03-13

Publications (2)

Publication Number Publication Date
JPS4893401A JPS4893401A (US06724976-20040420-M00002.png) 1973-12-03
JPS5027402B2 true JPS5027402B2 (US06724976-20040420-M00002.png) 1975-09-08

Family

ID=12166628

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2546072A Expired JPS5027402B2 (US06724976-20040420-M00002.png) 1972-03-13 1972-03-13

Country Status (2)

Country Link
JP (1) JPS5027402B2 (US06724976-20040420-M00002.png)
DE (1) DE2312496C2 (US06724976-20040420-M00002.png)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5351004A (en) * 1976-10-18 1978-05-10 Aicello Chemical Co Composition of photosensitive resin plate
JPS5534205A (en) * 1978-08-30 1980-03-10 Hitachi Ltd Photosensitive composition
JPS5858546A (ja) * 1981-10-02 1983-04-07 Kimoto & Co Ltd 製版用感光性マスク材料

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE686123C (de) * 1935-06-05 1940-01-03 Chemische Forschungs Gmbh Verfahren zur Veraenderung der Eigenschaften von Polyvinylalkoholen und ihren Derivaten
DE754015C (de) * 1940-02-24 1953-05-11 Johannes Dr Albrecht Lichtempfindliche Schicht zur Herstellung von Druckformen
GB1226104A (US06724976-20040420-M00002.png) * 1967-05-12 1971-03-24

Also Published As

Publication number Publication date
DE2312496A1 (de) 1973-09-27
JPS4893401A (US06724976-20040420-M00002.png) 1973-12-03
DE2312496C2 (de) 1985-01-31

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