JPS5026919B1 - - Google Patents
Info
- Publication number
- JPS5026919B1 JPS5026919B1 JP46098368A JP9836871A JPS5026919B1 JP S5026919 B1 JPS5026919 B1 JP S5026919B1 JP 46098368 A JP46098368 A JP 46098368A JP 9836871 A JP9836871 A JP 9836871A JP S5026919 B1 JPS5026919 B1 JP S5026919B1
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/16—Coating processes; Apparatus therefor
- G03F7/162—Coating on a rotating support, e.g. using a whirler or a spinner
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C—APPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05C11/00—Component parts, details or accessories not specifically provided for in groups B05C1/00 - B05C9/00
- B05C11/02—Apparatus for spreading or distributing liquids or other fluent materials already applied to a surface ; Controlling means therefor; Control of the thickness of a coating by spreading or distributing liquids or other fluent materials already applied to the coated surface
- B05C11/08—Spreading liquid or other fluent material by manipulating the work, e.g. tilting
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- H10P14/6342—
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Light Receiving Elements (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
- Weting (AREA)
- Image-Pickup Tubes, Image-Amplification Tubes, And Storage Tubes (AREA)
- Formation Of Various Coating Films On Cathode Ray Tubes And Lamps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US9582170A | 1970-12-07 | 1970-12-07 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4711719A JPS4711719A (en:Method) | 1972-06-10 |
| JPS5026919B1 true JPS5026919B1 (en:Method) | 1975-09-04 |
Family
ID=22253735
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP46098368A Pending JPS5026919B1 (en:Method) | 1970-12-07 | 1971-12-07 |
Country Status (6)
| Country | Link |
|---|---|
| US (2) | US3695928A (en:Method) |
| JP (1) | JPS5026919B1 (en:Method) |
| CA (1) | CA948048A (en:Method) |
| DE (1) | DE2160283B2 (en:Method) |
| FR (1) | FR2116568B1 (en:Method) |
| GB (1) | GB1375738A (en:Method) |
Families Citing this family (25)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| USRE32033E (en) * | 1969-07-29 | 1985-11-19 | Texas Instruments Incorporated | Automated slice processing |
| US3888674A (en) * | 1972-08-14 | 1975-06-10 | Texas Instruments Inc | Automatic slice processing |
| US3836388A (en) * | 1972-10-18 | 1974-09-17 | Western Electric Co | Distributing a fluid evenly over the surface of an article |
| DE2944180A1 (de) * | 1979-11-02 | 1981-05-07 | Licentia Patent-Verwaltungs-Gmbh, 6000 Frankfurt | Verfahren zum herstellen einer einen halbleiterkoerper einseitig bedeckenden isolierschicht |
| US4314523A (en) * | 1980-03-19 | 1982-02-09 | E. I. Du Pont De Nemours And Company | Centrifuge rotor apparatus for preparing particle spreads |
| US4280689A (en) * | 1980-06-27 | 1981-07-28 | Nasa | Head for high speed spinner having a vacuum chuck |
| US4385083A (en) * | 1980-08-25 | 1983-05-24 | Applied Magnetics Corporation | Apparatus and method for forming a thin film of coating material on a substrate having a vacuum applied to the edge thereof |
| WO1982001482A1 (en) * | 1980-11-06 | 1982-05-13 | Patent Versuch Censor | Method and installation for the processing of the upper side of a flat part by means of a liquid |
| US5261566A (en) * | 1981-02-16 | 1993-11-16 | Tokyo Ohka Kogyo Co., Ltd. | Solution-dropping nozzle device |
| GB8323303D0 (en) * | 1983-08-31 | 1983-10-05 | Campbell C V | Masking service |
| JPS60210840A (ja) * | 1984-03-06 | 1985-10-23 | Fujitsu Ltd | スピン処理装置 |
| JPH0444216Y2 (en:Method) * | 1985-10-07 | 1992-10-19 | ||
| GB2194500B (en) * | 1986-07-04 | 1991-01-23 | Canon Kk | A wafer handling apparatus |
| US5871811A (en) * | 1986-12-19 | 1999-02-16 | Applied Materials, Inc. | Method for protecting against deposition on a selected region of a substrate |
| KR970011644B1 (ko) * | 1988-04-08 | 1997-07-12 | 고다까 토시오 | 도포 처리 장치 |
| KR970007060B1 (ko) * | 1989-02-17 | 1997-05-02 | 다이닛뽕 인사쓰 가부시끼가이샤 | 점성액체의 도포방법 및 도포장치 |
| US5260174A (en) * | 1989-02-17 | 1993-11-09 | Dai Nippon Insatsu Kabushiki Kaisha | Method and apparatus for forming a coating of a viscous liquid on an object |
| US5094884A (en) * | 1990-04-24 | 1992-03-10 | Machine Technology, Inc. | Method and apparatus for applying a layer of a fluid material on a semiconductor wafer |
| US6179924B1 (en) | 1998-04-28 | 2001-01-30 | Applied Materials, Inc. | Heater for use in substrate processing apparatus to deposit tungsten |
| US6165873A (en) * | 1998-11-27 | 2000-12-26 | Nec Corporation | Process for manufacturing a semiconductor integrated circuit device |
| US6796517B1 (en) | 2000-03-09 | 2004-09-28 | Advanced Micro Devices, Inc. | Apparatus for the application of developing solution to a semiconductor wafer |
| JP4179276B2 (ja) * | 2004-12-24 | 2008-11-12 | セイコーエプソン株式会社 | 溶媒除去装置および溶媒除去方法 |
| WO2010033758A1 (en) * | 2008-09-18 | 2010-03-25 | Nordson Corporation | Automated vacuum assisted valve priming system and methods of use |
| ES2568696B2 (es) * | 2014-10-30 | 2016-11-14 | Universidad De Cádiz | Equipo para fabricación de láminas delgadas mediante el proceso de recubrimiento por rotación |
| RU2761134C2 (ru) * | 2020-05-26 | 2021-12-06 | Открытое акционерное общество "Научно-исследовательский институт полупроводникового машиностроения" (ОАО "НИИПМ") | Устройство для нанесения фоторезиста на полупроводниковые пластины |
Family Cites Families (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US2386591A (en) * | 1944-03-22 | 1945-10-09 | James T Campbell | Plate whirler |
| US2580131A (en) * | 1947-02-25 | 1951-12-25 | Chandler & Price Co | Method and apparatus for coating a lithographic plate |
| US3008601A (en) * | 1954-12-13 | 1961-11-14 | Collette Gregoire | Polytetrafluoroethylene coated cooking utensils |
| US2867551A (en) * | 1955-08-24 | 1959-01-06 | Owens Illinois Glass Co | Apparatus and method for applying conductive coatings to insulators |
| US2953483A (en) * | 1956-08-13 | 1960-09-20 | Owens Illinois Glass Co | Method and apparatus for applying coatings to selected areas of articles |
| US2946697A (en) * | 1957-12-31 | 1960-07-26 | Westinghouse Electric Corp | Masking method and apparatus |
| US3538883A (en) * | 1967-12-12 | 1970-11-10 | Alco Standard Corp | Vacuum chuck with safety device |
| US3577267A (en) * | 1968-03-19 | 1971-05-04 | Us Health Education & Welfare | Method of preparing blood smears |
-
1970
- 1970-12-07 US US95821A patent/US3695928A/en not_active Expired - Lifetime
-
1971
- 1971-07-07 CA CA117,617A patent/CA948048A/en not_active Expired
- 1971-12-04 DE DE2160283A patent/DE2160283B2/de not_active Withdrawn
- 1971-12-06 FR FR7143750A patent/FR2116568B1/fr not_active Expired
- 1971-12-07 JP JP46098368A patent/JPS5026919B1/ja active Pending
- 1971-12-07 GB GB5677471A patent/GB1375738A/en not_active Expired
-
1972
- 1972-06-06 US US00260087A patent/US3791342A/en not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| US3791342A (en) | 1974-02-12 |
| US3695928A (en) | 1972-10-03 |
| FR2116568A1 (en:Method) | 1972-07-13 |
| DE2160283B2 (de) | 1974-09-26 |
| CA948048A (en) | 1974-05-28 |
| FR2116568B1 (en:Method) | 1978-01-27 |
| JPS4711719A (en:Method) | 1972-06-10 |
| GB1375738A (en:Method) | 1974-11-27 |
| DE2160283A1 (de) | 1972-06-22 |