JPS5024263B2 - - Google Patents

Info

Publication number
JPS5024263B2
JPS5024263B2 JP46061699A JP6169971A JPS5024263B2 JP S5024263 B2 JPS5024263 B2 JP S5024263B2 JP 46061699 A JP46061699 A JP 46061699A JP 6169971 A JP6169971 A JP 6169971A JP S5024263 B2 JPS5024263 B2 JP S5024263B2
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP46061699A
Other versions
JPS4827962A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP46061699A priority Critical patent/JPS5024263B2/ja
Publication of JPS4827962A publication Critical patent/JPS4827962A/ja
Publication of JPS5024263B2 publication Critical patent/JPS5024263B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Or Chemical Processes And Apparatus (AREA)
JP46061699A 1971-08-16 1971-08-16 Expired JPS5024263B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP46061699A JPS5024263B2 (ja) 1971-08-16 1971-08-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP46061699A JPS5024263B2 (ja) 1971-08-16 1971-08-16

Publications (2)

Publication Number Publication Date
JPS4827962A JPS4827962A (ja) 1973-04-13
JPS5024263B2 true JPS5024263B2 (ja) 1975-08-14

Family

ID=13178744

Family Applications (1)

Application Number Title Priority Date Filing Date
JP46061699A Expired JPS5024263B2 (ja) 1971-08-16 1971-08-16

Country Status (1)

Country Link
JP (1) JPS5024263B2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103510073A (zh) * 2013-09-28 2014-01-15 无锡荣能半导体材料有限公司 一种气体混合器

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS627431A (ja) * 1985-07-04 1987-01-14 Canon Inc 反応装置
JPS627442A (ja) * 1985-07-04 1987-01-14 Canon Inc 反応装置
JPS6295126A (ja) * 1985-10-21 1987-05-01 Canon Inc 微粒子の吹き付け装置
JPS6295127A (ja) * 1985-10-21 1987-05-01 Canon Inc 微粒子の吹き付け装置
CN110465213B (zh) * 2018-05-12 2022-07-12 中国石油化工股份有限公司 气体旋风混合器

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103510073A (zh) * 2013-09-28 2014-01-15 无锡荣能半导体材料有限公司 一种气体混合器

Also Published As

Publication number Publication date
JPS4827962A (ja) 1973-04-13

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