JPS5023980A - - Google Patents
Info
- Publication number
- JPS5023980A JPS5023980A JP49056795A JP5679574A JPS5023980A JP S5023980 A JPS5023980 A JP S5023980A JP 49056795 A JP49056795 A JP 49056795A JP 5679574 A JP5679574 A JP 5679574A JP S5023980 A JPS5023980 A JP S5023980A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/316—Testing of analog circuits
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/26—Testing of individual semiconductor devices
- G01R31/2607—Circuits therefor
- G01R31/2621—Circuits therefor for testing field effect transistors, i.e. FET's
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Semiconductor Integrated Circuits (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US373042A US3882391A (en) | 1973-06-25 | 1973-06-25 | Testing the stability of MOSFET devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5023980A true JPS5023980A (ja) | 1975-03-14 |
| JPS5519427B2 JPS5519427B2 (ja) | 1980-05-26 |
Family
ID=23470672
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5679574A Expired JPS5519427B2 (ja) | 1973-06-25 | 1974-05-22 |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3882391A (ja) |
| JP (1) | JPS5519427B2 (ja) |
| DE (1) | DE2429836A1 (ja) |
| FR (1) | FR2234569B1 (ja) |
| GB (1) | GB1469486A (ja) |
| IT (1) | IT1009961B (ja) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6190464A (ja) * | 1984-10-11 | 1986-05-08 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置およびその製造方法 |
Families Citing this family (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4168432A (en) * | 1978-01-16 | 1979-09-18 | Rca Corporation | Method of testing radiation hardness of a semiconductor device |
| US4243937A (en) | 1979-04-06 | 1981-01-06 | General Instrument Corporation | Microelectronic device and method for testing same |
| DE3232671A1 (de) * | 1982-09-02 | 1984-03-08 | Siemens AG, 1000 Berlin und 8000 München | Anordnung und verfahren zur spannungsmessung an einem vergrabenen messobjekt |
| DE3235100A1 (de) * | 1982-09-22 | 1984-03-22 | Siemens AG, 1000 Berlin und 8000 München | Verfahren zur messung elektrischer potentiale an vergrabener festkoerpersubstanz |
| US4509012A (en) * | 1982-12-30 | 1985-04-02 | Lin Shi Tron | Method for determining the characteristic behavior of a metal-insulator-semiconductor device in a deep depletion mode |
| DE3312687A1 (de) * | 1983-04-08 | 1984-10-18 | Siemens AG, 1000 Berlin und 8000 München | Einrichtung zur pruefung von elektrische schaltkreise enthaltenden prueflingen |
| US4859938A (en) * | 1986-05-05 | 1989-08-22 | Intel Corporation | Novel technique to detect oxydonor generation in IC fabrication |
| US4829243A (en) * | 1988-02-19 | 1989-05-09 | Microelectronics And Computer Technology Corporation | Electron beam testing of electronic components |
| FR2674636B1 (fr) * | 1991-03-29 | 1994-07-29 | Commissariat Energie Atomique | Procede et dispositif de qualification d'un systeme capacitif. |
| DE19610065A1 (de) * | 1996-03-14 | 1997-09-18 | Siemens Ag | Verfahren zur Abschätzung der Lebensdauer eines Leistungshalbleiter-Bauelements |
| US5781445A (en) * | 1996-08-22 | 1998-07-14 | Taiwan Semiconductor Manufacturing Company, Ltd. | Plasma damage monitor |
| US6472233B1 (en) * | 1999-08-02 | 2002-10-29 | Advanced Micro Devices, Inc. | MOSFET test structure for capacitance-voltage measurements |
| US7949985B2 (en) * | 2007-06-01 | 2011-05-24 | Synopsys, Inc. | Method for compensation of process-induced performance variation in a MOSFET integrated circuit |
| CN109270423B (zh) * | 2018-10-03 | 2020-11-20 | 大连理工大学 | 一种SiC MOSFET器件低温稳定性的评价测试方法 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3668523A (en) * | 1969-05-07 | 1972-06-06 | Bell Telephone Labor Inc | Electrical testing of dielectric layers, exhibiting voltage dependent capacitance, with linear ramp voltages |
-
1973
- 1973-06-25 US US373042A patent/US3882391A/en not_active Expired - Lifetime
-
1974
- 1974-04-19 FR FR7414332A patent/FR2234569B1/fr not_active Expired
- 1974-04-22 IT IT21710/74A patent/IT1009961B/it active
- 1974-05-01 GB GB1903774A patent/GB1469486A/en not_active Expired
- 1974-05-22 JP JP5679574A patent/JPS5519427B2/ja not_active Expired
- 1974-06-21 DE DE2429836A patent/DE2429836A1/de not_active Withdrawn
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6190464A (ja) * | 1984-10-11 | 1986-05-08 | Nippon Telegr & Teleph Corp <Ntt> | 半導体装置およびその製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| FR2234569B1 (ja) | 1976-06-25 |
| DE2429836A1 (de) | 1975-01-23 |
| JPS5519427B2 (ja) | 1980-05-26 |
| GB1469486A (en) | 1977-04-06 |
| US3882391A (en) | 1975-05-06 |
| FR2234569A1 (ja) | 1975-01-17 |
| IT1009961B (it) | 1976-12-20 |