JPS5023278A - - Google Patents
Info
- Publication number
- JPS5023278A JPS5023278A JP48072841A JP7284173A JPS5023278A JP S5023278 A JPS5023278 A JP S5023278A JP 48072841 A JP48072841 A JP 48072841A JP 7284173 A JP7284173 A JP 7284173A JP S5023278 A JPS5023278 A JP S5023278A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7284173A JPS5410272B2 (en) | 1973-06-29 | 1973-06-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7284173A JPS5410272B2 (en) | 1973-06-29 | 1973-06-29 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5023278A true JPS5023278A (en) | 1975-03-12 |
JPS5410272B2 JPS5410272B2 (en) | 1979-05-02 |
Family
ID=13501013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7284173A Expired JPS5410272B2 (en) | 1973-06-29 | 1973-06-29 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5410272B2 (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819519A (en) * | 1981-07-28 | 1983-02-04 | Fujitsu Ltd | Method for measuring temperature of substrate |
JP2007218591A (en) * | 2006-02-14 | 2007-08-30 | Toyo Univ | Hybrid-type surface thermometer, apparatus, and method for measuring temperature distribution |
-
1973
- 1973-06-29 JP JP7284173A patent/JPS5410272B2/ja not_active Expired
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5819519A (en) * | 1981-07-28 | 1983-02-04 | Fujitsu Ltd | Method for measuring temperature of substrate |
JP2007218591A (en) * | 2006-02-14 | 2007-08-30 | Toyo Univ | Hybrid-type surface thermometer, apparatus, and method for measuring temperature distribution |
Also Published As
Publication number | Publication date |
---|---|
JPS5410272B2 (en) | 1979-05-02 |