JPS5023278A - - Google Patents

Info

Publication number
JPS5023278A
JPS5023278A JP48072841A JP7284173A JPS5023278A JP S5023278 A JPS5023278 A JP S5023278A JP 48072841 A JP48072841 A JP 48072841A JP 7284173 A JP7284173 A JP 7284173A JP S5023278 A JPS5023278 A JP S5023278A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48072841A
Other languages
Japanese (ja)
Other versions
JPS5410272B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7284173A priority Critical patent/JPS5410272B2/ja
Publication of JPS5023278A publication Critical patent/JPS5023278A/ja
Publication of JPS5410272B2 publication Critical patent/JPS5410272B2/ja
Expired legal-status Critical Current

Links

JP7284173A 1973-06-29 1973-06-29 Expired JPS5410272B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7284173A JPS5410272B2 (en) 1973-06-29 1973-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7284173A JPS5410272B2 (en) 1973-06-29 1973-06-29

Publications (2)

Publication Number Publication Date
JPS5023278A true JPS5023278A (en) 1975-03-12
JPS5410272B2 JPS5410272B2 (en) 1979-05-02

Family

ID=13501013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7284173A Expired JPS5410272B2 (en) 1973-06-29 1973-06-29

Country Status (1)

Country Link
JP (1) JPS5410272B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819519A (en) * 1981-07-28 1983-02-04 Fujitsu Ltd Method for measuring temperature of substrate
JP2007218591A (en) * 2006-02-14 2007-08-30 Toyo Univ Hybrid-type surface thermometer, apparatus, and method for measuring temperature distribution

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5819519A (en) * 1981-07-28 1983-02-04 Fujitsu Ltd Method for measuring temperature of substrate
JP2007218591A (en) * 2006-02-14 2007-08-30 Toyo Univ Hybrid-type surface thermometer, apparatus, and method for measuring temperature distribution

Also Published As

Publication number Publication date
JPS5410272B2 (en) 1979-05-02

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