JPS5023276A - - Google Patents

Info

Publication number
JPS5023276A
JPS5023276A JP7339173A JP7339173A JPS5023276A JP S5023276 A JPS5023276 A JP S5023276A JP 7339173 A JP7339173 A JP 7339173A JP 7339173 A JP7339173 A JP 7339173A JP S5023276 A JPS5023276 A JP S5023276A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7339173A
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7339173A priority Critical patent/JPS5023276A/ja
Publication of JPS5023276A publication Critical patent/JPS5023276A/ja
Pending legal-status Critical Current

Links

JP7339173A 1973-06-29 1973-06-29 Pending JPS5023276A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7339173A JPS5023276A (ja) 1973-06-29 1973-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7339173A JPS5023276A (ja) 1973-06-29 1973-06-29

Publications (1)

Publication Number Publication Date
JPS5023276A true JPS5023276A (ja) 1975-03-12

Family

ID=13516836

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7339173A Pending JPS5023276A (ja) 1973-06-29 1973-06-29

Country Status (1)

Country Link
JP (1) JPS5023276A (ja)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161630A (en) * 1981-03-27 1982-10-05 Gen Signal Corp Apparatus for remote detection of torque
JPH0645223A (ja) * 1993-06-25 1994-02-18 Nikon Corp 投影型露光装置
JP4677043B2 (ja) * 2009-06-10 2011-04-27 日東精工株式会社 トルクセンサ

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57161630A (en) * 1981-03-27 1982-10-05 Gen Signal Corp Apparatus for remote detection of torque
JPH0645223A (ja) * 1993-06-25 1994-02-18 Nikon Corp 投影型露光装置
JP4677043B2 (ja) * 2009-06-10 2011-04-27 日東精工株式会社 トルクセンサ

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