JPS5023004A - - Google Patents
Info
- Publication number
- JPS5023004A JPS5023004A JP7476073A JP7476073A JPS5023004A JP S5023004 A JPS5023004 A JP S5023004A JP 7476073 A JP7476073 A JP 7476073A JP 7476073 A JP7476073 A JP 7476073A JP S5023004 A JPS5023004 A JP S5023004A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7476073A JPS5345923B2 (en) | 1973-07-04 | 1973-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7476073A JPS5345923B2 (en) | 1973-07-04 | 1973-07-04 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5023004A true JPS5023004A (en) | 1975-03-12 |
| JPS5345923B2 JPS5345923B2 (en) | 1978-12-09 |
Family
ID=13556541
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7476073A Expired JPS5345923B2 (en) | 1973-07-04 | 1973-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5345923B2 (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5629099A (en) * | 1979-08-01 | 1981-03-23 | Hitachi Ltd | Diffuser for centrifugal fluid machinery |
| KR20160029664A (en) | 2014-09-05 | 2016-03-15 | 도쿄엘렉트론가부시키가이샤 | Film forming method and film forming apparatus |
-
1973
- 1973-07-04 JP JP7476073A patent/JPS5345923B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5629099A (en) * | 1979-08-01 | 1981-03-23 | Hitachi Ltd | Diffuser for centrifugal fluid machinery |
| JPS608359B2 (en) * | 1979-08-01 | 1985-03-02 | 株式会社日立製作所 | centrifugal compressor diffuser |
| KR20160029664A (en) | 2014-09-05 | 2016-03-15 | 도쿄엘렉트론가부시키가이샤 | Film forming method and film forming apparatus |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5345923B2 (en) | 1978-12-09 |