JPS5022583A - - Google Patents

Info

Publication number
JPS5022583A
JPS5022583A JP7171473A JP7171473A JPS5022583A JP S5022583 A JPS5022583 A JP S5022583A JP 7171473 A JP7171473 A JP 7171473A JP 7171473 A JP7171473 A JP 7171473A JP S5022583 A JPS5022583 A JP S5022583A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP7171473A
Other languages
Japanese (ja)
Other versions
JPS5626145B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP7171473A priority Critical patent/JPS5626145B2/ja
Publication of JPS5022583A publication Critical patent/JPS5022583A/ja
Publication of JPS5626145B2 publication Critical patent/JPS5626145B2/ja
Expired legal-status Critical Current

Links

JP7171473A 1973-06-27 1973-06-27 Expired JPS5626145B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7171473A JPS5626145B2 (en) 1973-06-27 1973-06-27

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7171473A JPS5626145B2 (en) 1973-06-27 1973-06-27

Publications (2)

Publication Number Publication Date
JPS5022583A true JPS5022583A (en) 1975-03-11
JPS5626145B2 JPS5626145B2 (en) 1981-06-17

Family

ID=13468461

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7171473A Expired JPS5626145B2 (en) 1973-06-27 1973-06-27

Country Status (1)

Country Link
JP (1) JPS5626145B2 (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54987A (en) * 1977-06-06 1979-01-06 Hitachi Ltd Manufacture for semiconductor device
JPH0878672A (en) * 1994-09-01 1996-03-22 Nec Corp Mos type of semiconductor device and its manufacture
JP2010161397A (en) * 2002-06-26 2010-07-22 Semequip Inc Semiconductor device and method of fabricating semiconductor device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6257859U (en) * 1985-09-30 1987-04-10

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884574A (en) * 1972-02-09 1973-11-09

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4884574A (en) * 1972-02-09 1973-11-09

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54987A (en) * 1977-06-06 1979-01-06 Hitachi Ltd Manufacture for semiconductor device
JPH0878672A (en) * 1994-09-01 1996-03-22 Nec Corp Mos type of semiconductor device and its manufacture
JP2010161397A (en) * 2002-06-26 2010-07-22 Semequip Inc Semiconductor device and method of fabricating semiconductor device

Also Published As

Publication number Publication date
JPS5626145B2 (en) 1981-06-17

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