JPS5021943A - - Google Patents

Info

Publication number
JPS5021943A
JPS5021943A JP48073057A JP7305773A JPS5021943A JP S5021943 A JPS5021943 A JP S5021943A JP 48073057 A JP48073057 A JP 48073057A JP 7305773 A JP7305773 A JP 7305773A JP S5021943 A JPS5021943 A JP S5021943A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48073057A
Other versions
JPS5248585B2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48073057A priority Critical patent/JPS5248585B2/ja
Publication of JPS5021943A publication Critical patent/JPS5021943A/ja
Publication of JPS5248585B2 publication Critical patent/JPS5248585B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP48073057A 1973-06-28 1973-06-28 Expired JPS5248585B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48073057A JPS5248585B2 (ja) 1973-06-28 1973-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48073057A JPS5248585B2 (ja) 1973-06-28 1973-06-28

Publications (2)

Publication Number Publication Date
JPS5021943A true JPS5021943A (ja) 1975-03-08
JPS5248585B2 JPS5248585B2 (ja) 1977-12-10

Family

ID=13507335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48073057A Expired JPS5248585B2 (ja) 1973-06-28 1973-06-28

Country Status (1)

Country Link
JP (1) JPS5248585B2 (ja)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928564A (ja) * 1982-08-05 1984-02-15 Sumitomo Electric Ind Ltd 清浄な化学蒸着膜の製造法
JPS59118879A (ja) * 1982-12-25 1984-07-09 Toshiba Corp 耐摩耗部品
JPS61128939U (ja) * 1985-01-30 1986-08-13
JPS61197836U (ja) * 1985-05-29 1986-12-10
JPS62104779A (ja) * 1985-10-31 1987-05-15 Toshiba Corp レ−ルシヤフト
JPH0497531U (ja) * 1991-07-18 1992-08-24

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928564A (ja) * 1982-08-05 1984-02-15 Sumitomo Electric Ind Ltd 清浄な化学蒸着膜の製造法
JPS59118879A (ja) * 1982-12-25 1984-07-09 Toshiba Corp 耐摩耗部品
JPS61128939U (ja) * 1985-01-30 1986-08-13
JPS61197836U (ja) * 1985-05-29 1986-12-10
JPH0516911Y2 (ja) * 1985-05-29 1993-05-07
JPS62104779A (ja) * 1985-10-31 1987-05-15 Toshiba Corp レ−ルシヤフト
JPH0497531U (ja) * 1991-07-18 1992-08-24

Also Published As

Publication number Publication date
JPS5248585B2 (ja) 1977-12-10

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