JPS5021943A - - Google Patents

Info

Publication number
JPS5021943A
JPS5021943A JP48073057A JP7305773A JPS5021943A JP S5021943 A JPS5021943 A JP S5021943A JP 48073057 A JP48073057 A JP 48073057A JP 7305773 A JP7305773 A JP 7305773A JP S5021943 A JPS5021943 A JP S5021943A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP48073057A
Other languages
Japanese (ja)
Other versions
JPS5248585B2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP48073057A priority Critical patent/JPS5248585B2/ja
Publication of JPS5021943A publication Critical patent/JPS5021943A/ja
Publication of JPS5248585B2 publication Critical patent/JPS5248585B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)
JP48073057A 1973-06-28 1973-06-28 Expired JPS5248585B2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP48073057A JPS5248585B2 (US20090163788A1-20090625-C00002.png) 1973-06-28 1973-06-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP48073057A JPS5248585B2 (US20090163788A1-20090625-C00002.png) 1973-06-28 1973-06-28

Publications (2)

Publication Number Publication Date
JPS5021943A true JPS5021943A (US20090163788A1-20090625-C00002.png) 1975-03-08
JPS5248585B2 JPS5248585B2 (US20090163788A1-20090625-C00002.png) 1977-12-10

Family

ID=13507335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP48073057A Expired JPS5248585B2 (US20090163788A1-20090625-C00002.png) 1973-06-28 1973-06-28

Country Status (1)

Country Link
JP (1) JPS5248585B2 (US20090163788A1-20090625-C00002.png)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928564A (ja) * 1982-08-05 1984-02-15 Sumitomo Electric Ind Ltd 清浄な化学蒸着膜の製造法
JPS59118879A (ja) * 1982-12-25 1984-07-09 Toshiba Corp 耐摩耗部品
JPS61128939U (US20090163788A1-20090625-C00002.png) * 1985-01-30 1986-08-13
JPS61197836U (US20090163788A1-20090625-C00002.png) * 1985-05-29 1986-12-10
JPS62104779A (ja) * 1985-10-31 1987-05-15 Toshiba Corp レ−ルシヤフト
JPH0497531U (US20090163788A1-20090625-C00002.png) * 1991-07-18 1992-08-24

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5928564A (ja) * 1982-08-05 1984-02-15 Sumitomo Electric Ind Ltd 清浄な化学蒸着膜の製造法
JPS59118879A (ja) * 1982-12-25 1984-07-09 Toshiba Corp 耐摩耗部品
JPS61128939U (US20090163788A1-20090625-C00002.png) * 1985-01-30 1986-08-13
JPS61197836U (US20090163788A1-20090625-C00002.png) * 1985-05-29 1986-12-10
JPH0516911Y2 (US20090163788A1-20090625-C00002.png) * 1985-05-29 1993-05-07
JPS62104779A (ja) * 1985-10-31 1987-05-15 Toshiba Corp レ−ルシヤフト
JPH0497531U (US20090163788A1-20090625-C00002.png) * 1991-07-18 1992-08-24

Also Published As

Publication number Publication date
JPS5248585B2 (US20090163788A1-20090625-C00002.png) 1977-12-10

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