JPS5021350A - - Google Patents
Info
- Publication number
- JPS5021350A JPS5021350A JP7170373A JP7170373A JPS5021350A JP S5021350 A JPS5021350 A JP S5021350A JP 7170373 A JP7170373 A JP 7170373A JP 7170373 A JP7170373 A JP 7170373A JP S5021350 A JPS5021350 A JP S5021350A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7170373A JPS5021350A (ja) | 1973-06-27 | 1973-06-27 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7170373A JPS5021350A (ja) | 1973-06-27 | 1973-06-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5021350A true JPS5021350A (ja) | 1975-03-06 |
Family
ID=13468149
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7170373A Pending JPS5021350A (ja) | 1973-06-27 | 1973-06-27 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5021350A (ja) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5337937A (en) * | 1976-09-20 | 1978-04-07 | Kiyomi Kageyama | Method of and apparatus for preventing rotary heat exchanger from stopping in apparatus for denitrating and or desulfurixing exhaust gas |
| JPS5347656U (ja) * | 1976-09-28 | 1978-04-22 | ||
| JPS5349360A (en) * | 1976-10-18 | 1978-05-04 | Kiyomi Kageyama | Method of converting rotary heat exchanger from normal rotation to washing low speed rotation |
| JPS6089939A (ja) * | 1983-10-21 | 1985-05-20 | Toshiba Corp | 半導体装置の製造方法 |
-
1973
- 1973-06-27 JP JP7170373A patent/JPS5021350A/ja active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5337937A (en) * | 1976-09-20 | 1978-04-07 | Kiyomi Kageyama | Method of and apparatus for preventing rotary heat exchanger from stopping in apparatus for denitrating and or desulfurixing exhaust gas |
| JPS5347656U (ja) * | 1976-09-28 | 1978-04-22 | ||
| JPS5349360A (en) * | 1976-10-18 | 1978-05-04 | Kiyomi Kageyama | Method of converting rotary heat exchanger from normal rotation to washing low speed rotation |
| JPS6089939A (ja) * | 1983-10-21 | 1985-05-20 | Toshiba Corp | 半導体装置の製造方法 |