JPS5020571A - - Google Patents
Info
- Publication number
- JPS5020571A JPS5020571A JP49056182A JP5618274A JPS5020571A JP S5020571 A JPS5020571 A JP S5020571A JP 49056182 A JP49056182 A JP 49056182A JP 5618274 A JP5618274 A JP 5618274A JP S5020571 A JPS5020571 A JP S5020571A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B13/00—Machines or plants for applying liquids or other fluent materials to surfaces of objects or other work by spraying, not covered by groups B05B1/00 - B05B11/00
- B05B13/02—Means for supporting work; Arrangement or mounting of spray heads; Adaptation or arrangement of means for feeding work
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
- B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
- B05B15/00—Details of spraying plant or spraying apparatus not otherwise provided for; Accessories
- B05B15/70—Arrangements for moving spray heads automatically to or from the working position
Landscapes
- Spray Control Apparatus (AREA)
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US36262673A | 1973-05-21 | 1973-05-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5020571A true JPS5020571A (de) | 1975-03-04 |
Family
ID=23426859
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP49056182A Pending JPS5020571A (de) | 1973-05-21 | 1974-05-21 |
Country Status (4)
| Country | Link |
|---|---|
| JP (1) | JPS5020571A (de) |
| DE (1) | DE2424482A1 (de) |
| FR (1) | FR2230420B3 (de) |
| IT (1) | IT1011841B (de) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5452136A (en) * | 1977-09-26 | 1979-04-24 | Nippon Synthetic Chem Ind Co Ltd:The | Aqueous coating composition |
| JPS59215729A (ja) * | 1983-05-21 | 1984-12-05 | Ulvac Corp | 半導体もしくは磁気記録媒体等の基板の洗浄装置 |
| JPH03108717A (ja) * | 1989-09-22 | 1991-05-08 | Yokogawa Electric Corp | シリコンウエハーの洗浄装置 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB2198810A (en) * | 1986-12-19 | 1988-06-22 | Philips Electronic Associated | Apparatus suitable for processing semiconductor slices |
| CN108636672B (zh) * | 2018-05-30 | 2020-04-28 | 常州铭赛机器人科技股份有限公司 | 称重修正运行速度的喷胶方法和流体涂布装置 |
-
1974
- 1974-05-20 DE DE2424482A patent/DE2424482A1/de active Pending
- 1974-05-20 IT IT68571/74A patent/IT1011841B/it active
- 1974-05-20 FR FR7417470A patent/FR2230420B3/fr not_active Expired
- 1974-05-21 JP JP49056182A patent/JPS5020571A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5452136A (en) * | 1977-09-26 | 1979-04-24 | Nippon Synthetic Chem Ind Co Ltd:The | Aqueous coating composition |
| JPS5840993B2 (ja) * | 1977-09-26 | 1983-09-09 | 日本合成化学工業株式会社 | 水性塗料組成物 |
| JPS59215729A (ja) * | 1983-05-21 | 1984-12-05 | Ulvac Corp | 半導体もしくは磁気記録媒体等の基板の洗浄装置 |
| JPH0129054B2 (de) * | 1983-05-21 | 1989-06-07 | Ulvac Corp | |
| JPH03108717A (ja) * | 1989-09-22 | 1991-05-08 | Yokogawa Electric Corp | シリコンウエハーの洗浄装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| DE2424482A1 (de) | 1974-12-12 |
| IT1011841B (it) | 1977-02-10 |
| FR2230420A1 (de) | 1974-12-20 |
| FR2230420B3 (de) | 1977-03-18 |