JPS5017972A - - Google Patents
Info
- Publication number
- JPS5017972A JPS5017972A JP6905273A JP6905273A JPS5017972A JP S5017972 A JPS5017972 A JP S5017972A JP 6905273 A JP6905273 A JP 6905273A JP 6905273 A JP6905273 A JP 6905273A JP S5017972 A JPS5017972 A JP S5017972A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6905273A JPS5626140B2 (en) | 1973-06-19 | 1973-06-19 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP6905273A JPS5626140B2 (en) | 1973-06-19 | 1973-06-19 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5017972A true JPS5017972A (en) | 1975-02-25 |
JPS5626140B2 JPS5626140B2 (en) | 1981-06-17 |
Family
ID=13391400
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP6905273A Expired JPS5626140B2 (en) | 1973-06-19 | 1973-06-19 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5626140B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61193428A (en) * | 1985-02-22 | 1986-08-27 | Toshiba Corp | Semiconductor vapor growth device |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4841669A (en) * | 1971-09-28 | 1973-06-18 |
-
1973
- 1973-06-19 JP JP6905273A patent/JPS5626140B2/ja not_active Expired
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4841669A (en) * | 1971-09-28 | 1973-06-18 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61193428A (en) * | 1985-02-22 | 1986-08-27 | Toshiba Corp | Semiconductor vapor growth device |
Also Published As
Publication number | Publication date |
---|---|
JPS5626140B2 (en) | 1981-06-17 |