JPS5017972A - - Google Patents

Info

Publication number
JPS5017972A
JPS5017972A JP6905273A JP6905273A JPS5017972A JP S5017972 A JPS5017972 A JP S5017972A JP 6905273 A JP6905273 A JP 6905273A JP 6905273 A JP6905273 A JP 6905273A JP S5017972 A JPS5017972 A JP S5017972A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6905273A
Other languages
Japanese (ja)
Other versions
JPS5626140B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6905273A priority Critical patent/JPS5626140B2/ja
Publication of JPS5017972A publication Critical patent/JPS5017972A/ja
Publication of JPS5626140B2 publication Critical patent/JPS5626140B2/ja
Expired legal-status Critical Current

Links

JP6905273A 1973-06-19 1973-06-19 Expired JPS5626140B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6905273A JPS5626140B2 (en) 1973-06-19 1973-06-19

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6905273A JPS5626140B2 (en) 1973-06-19 1973-06-19

Publications (2)

Publication Number Publication Date
JPS5017972A true JPS5017972A (en) 1975-02-25
JPS5626140B2 JPS5626140B2 (en) 1981-06-17

Family

ID=13391400

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6905273A Expired JPS5626140B2 (en) 1973-06-19 1973-06-19

Country Status (1)

Country Link
JP (1) JPS5626140B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61193428A (en) * 1985-02-22 1986-08-27 Toshiba Corp Semiconductor vapor growth device

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841669A (en) * 1971-09-28 1973-06-18

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4841669A (en) * 1971-09-28 1973-06-18

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61193428A (en) * 1985-02-22 1986-08-27 Toshiba Corp Semiconductor vapor growth device

Also Published As

Publication number Publication date
JPS5626140B2 (en) 1981-06-17

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