JPS5017034A - - Google Patents
Info
- Publication number
- JPS5017034A JPS5017034A JP48070282A JP7028273A JPS5017034A JP S5017034 A JPS5017034 A JP S5017034A JP 48070282 A JP48070282 A JP 48070282A JP 7028273 A JP7028273 A JP 7028273A JP S5017034 A JPS5017034 A JP S5017034A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7028273A JPS5612770B2 (ja) | 1973-06-20 | 1973-06-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7028273A JPS5612770B2 (ja) | 1973-06-20 | 1973-06-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5017034A true JPS5017034A (ja) | 1975-02-22 |
| JPS5612770B2 JPS5612770B2 (ja) | 1981-03-24 |
Family
ID=13426965
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7028273A Expired JPS5612770B2 (ja) | 1973-06-20 | 1973-06-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5612770B2 (ja) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58130273A (ja) * | 1982-01-29 | 1983-08-03 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JPH01195274A (ja) * | 1988-01-29 | 1989-08-07 | Nippon Steel Corp | 薄膜の連続形成装置 |
-
1973
- 1973-06-20 JP JP7028273A patent/JPS5612770B2/ja not_active Expired
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58130273A (ja) * | 1982-01-29 | 1983-08-03 | Mitsubishi Heavy Ind Ltd | 真空蒸着装置 |
| JPH01195274A (ja) * | 1988-01-29 | 1989-08-07 | Nippon Steel Corp | 薄膜の連続形成装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5612770B2 (ja) | 1981-03-24 |