JPS5016978U - - Google Patents

Info

Publication number
JPS5016978U
JPS5016978U JP6899273U JP6899273U JPS5016978U JP S5016978 U JPS5016978 U JP S5016978U JP 6899273 U JP6899273 U JP 6899273U JP 6899273 U JP6899273 U JP 6899273U JP S5016978 U JPS5016978 U JP S5016978U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6899273U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6899273U priority Critical patent/JPS5016978U/ja
Publication of JPS5016978U publication Critical patent/JPS5016978U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Analysing Materials By The Use Of Radiation (AREA)
JP6899273U 1973-06-11 1973-06-11 Pending JPS5016978U (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6899273U JPS5016978U (enExample) 1973-06-11 1973-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6899273U JPS5016978U (enExample) 1973-06-11 1973-06-11

Publications (1)

Publication Number Publication Date
JPS5016978U true JPS5016978U (enExample) 1975-02-22

Family

ID=28236479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6899273U Pending JPS5016978U (enExample) 1973-06-11 1973-06-11

Country Status (1)

Country Link
JP (1) JPS5016978U (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5845736A (ja) * 1981-09-01 1983-03-17 ラム・リサーチ・コーポレイション プラズマエツチング装置
JPS59125615A (ja) * 1982-12-28 1984-07-20 Fujitsu Ltd 半導体装置の製造方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3156824A (en) * 1960-12-01 1964-11-10 Howdon Videx Products Corp X-ray collimator having visible light centering arrangement and an adjustable filter for X-rays
US3612867A (en) * 1968-09-24 1971-10-12 Nikolai Vasilievich Rabodzei X-ray television microscope
US3767931A (en) * 1972-11-14 1973-10-23 Varian Associates Adjustable x-ray beam collimator with shutter for illumination of the radiation pattern

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3156824A (en) * 1960-12-01 1964-11-10 Howdon Videx Products Corp X-ray collimator having visible light centering arrangement and an adjustable filter for X-rays
US3612867A (en) * 1968-09-24 1971-10-12 Nikolai Vasilievich Rabodzei X-ray television microscope
US3767931A (en) * 1972-11-14 1973-10-23 Varian Associates Adjustable x-ray beam collimator with shutter for illumination of the radiation pattern

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5845736A (ja) * 1981-09-01 1983-03-17 ラム・リサーチ・コーポレイション プラズマエツチング装置
JPS59125615A (ja) * 1982-12-28 1984-07-20 Fujitsu Ltd 半導体装置の製造方法

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