JPS501667A - - Google Patents

Info

Publication number
JPS501667A
JPS501667A JP4972073A JP4972073A JPS501667A JP S501667 A JPS501667 A JP S501667A JP 4972073 A JP4972073 A JP 4972073A JP 4972073 A JP4972073 A JP 4972073A JP S501667 A JPS501667 A JP S501667A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP4972073A
Other languages
Japanese (ja)
Other versions
JPS565574B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP4972073A priority Critical patent/JPS565574B2/ja
Publication of JPS501667A publication Critical patent/JPS501667A/ja
Publication of JPS565574B2 publication Critical patent/JPS565574B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Investigating Or Analyzing Non-Biological Materials By The Use Of Chemical Means (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP4972073A 1973-05-07 1973-05-07 Expired JPS565574B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4972073A JPS565574B2 (enrdf_load_stackoverflow) 1973-05-07 1973-05-07

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4972073A JPS565574B2 (enrdf_load_stackoverflow) 1973-05-07 1973-05-07

Publications (2)

Publication Number Publication Date
JPS501667A true JPS501667A (enrdf_load_stackoverflow) 1975-01-09
JPS565574B2 JPS565574B2 (enrdf_load_stackoverflow) 1981-02-05

Family

ID=12839013

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4972073A Expired JPS565574B2 (enrdf_load_stackoverflow) 1973-05-07 1973-05-07

Country Status (1)

Country Link
JP (1) JPS565574B2 (enrdf_load_stackoverflow)

Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119478A (en) * 1975-04-10 1976-10-20 Nakamuratome Seimitsu Kogyo Kk Flow adjusting method for flow adjusting valve and motor direction swi tch flow adjusting valve
JPS5685826A (en) * 1979-12-14 1981-07-13 Hitachi Ltd Vacuum treatment device
JPS5696840A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating method
JPS5696841A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating apparatus
JPS56174846U (enrdf_load_stackoverflow) * 1980-05-26 1981-12-23
JPS5735323A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photoresist film
JPS5735322A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photo-resist film
DE3049037A1 (de) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim Verfahren zum gleichzeitigen, kontinuierlichen verfestigen und beschichten eines vliesstoffes
DE3049036A1 (de) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim Verfahren zum gleichzeitigen, kontinuierlichen verfestigen und beschichten eines vliesstoffes
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置
JPH02224237A (ja) * 1990-01-16 1990-09-06 Hitachi Ltd 真空処理方法

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS51119478A (en) * 1975-04-10 1976-10-20 Nakamuratome Seimitsu Kogyo Kk Flow adjusting method for flow adjusting valve and motor direction swi tch flow adjusting valve
JPS5685826A (en) * 1979-12-14 1981-07-13 Hitachi Ltd Vacuum treatment device
JPS5696840A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating method
JPS5696841A (en) * 1979-12-28 1981-08-05 Fujitsu Ltd Microwave plasma treating apparatus
JPS56174846U (enrdf_load_stackoverflow) * 1980-05-26 1981-12-23
JPS5735322A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photo-resist film
JPS5735323A (en) * 1980-08-13 1982-02-25 Fujitsu Ltd Removal of photoresist film
DE3049037A1 (de) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim Verfahren zum gleichzeitigen, kontinuierlichen verfestigen und beschichten eines vliesstoffes
DE3049036A1 (de) * 1980-12-24 1982-07-22 Fa. Carl Freudenberg, 6940 Weinheim Verfahren zum gleichzeitigen, kontinuierlichen verfestigen und beschichten eines vliesstoffes
DE3049037C2 (de) * 1980-12-24 1984-05-03 Fa. Carl Freudenberg, 6940 Weinheim Verfahren zum gleichzeitigen, kontinuierlichen Verfestigen und Beschichten eines Vliesstoffes
DE3049036C2 (de) * 1980-12-24 1984-09-13 Fa. Carl Freudenberg, 6940 Weinheim Verfahren zum gleichzeitigen, kontinuierlichen Verfestigen und Beschichten eines Vliesstoffes
JPS5887825A (ja) * 1981-11-20 1983-05-25 Fujitsu Ltd マイクロ波プラズマ処理装置
JPH02224237A (ja) * 1990-01-16 1990-09-06 Hitachi Ltd 真空処理方法

Also Published As

Publication number Publication date
JPS565574B2 (enrdf_load_stackoverflow) 1981-02-05

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