JPS5016679U - - Google Patents

Info

Publication number
JPS5016679U
JPS5016679U JP5249873U JP5249873U JPS5016679U JP S5016679 U JPS5016679 U JP S5016679U JP 5249873 U JP5249873 U JP 5249873U JP 5249873 U JP5249873 U JP 5249873U JP S5016679 U JPS5016679 U JP S5016679U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5249873U
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5249873U priority Critical patent/JPS5016679U/ja
Publication of JPS5016679U publication Critical patent/JPS5016679U/ja
Pending legal-status Critical Current

Links

JP5249873U 1973-04-28 1973-04-28 Pending JPS5016679U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5249873U JPS5016679U (enrdf_load_stackoverflow) 1973-04-28 1973-04-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5249873U JPS5016679U (enrdf_load_stackoverflow) 1973-04-28 1973-04-28

Publications (1)

Publication Number Publication Date
JPS5016679U true JPS5016679U (enrdf_load_stackoverflow) 1975-02-21

Family

ID=28199592

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5249873U Pending JPS5016679U (enrdf_load_stackoverflow) 1973-04-28 1973-04-28

Country Status (1)

Country Link
JP (1) JPS5016679U (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338843U (enrdf_load_stackoverflow) * 1989-08-25 1991-04-15
JP2013098576A (ja) * 2011-11-02 2013-05-20 Research And Business Foundation Sankyunquan Univ 移送方向転換が可能な基板移送装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338843U (enrdf_load_stackoverflow) * 1989-08-25 1991-04-15
JP2013098576A (ja) * 2011-11-02 2013-05-20 Research And Business Foundation Sankyunquan Univ 移送方向転換が可能な基板移送装置
KR101405780B1 (ko) * 2011-11-02 2014-06-17 성균관대학교산학협력단 이송방향 전환이 가능한 기판이송장치

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