JPS50160181A - - Google Patents

Info

Publication number
JPS50160181A
JPS50160181A JP6971274A JP6971274A JPS50160181A JP S50160181 A JPS50160181 A JP S50160181A JP 6971274 A JP6971274 A JP 6971274A JP 6971274 A JP6971274 A JP 6971274A JP S50160181 A JPS50160181 A JP S50160181A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP6971274A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6971274A priority Critical patent/JPS50160181A/ja
Publication of JPS50160181A publication Critical patent/JPS50160181A/ja
Pending legal-status Critical Current

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Landscapes

  • Physical Vapour Deposition (AREA)
JP6971274A 1974-06-20 1974-06-20 Pending JPS50160181A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6971274A JPS50160181A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-20 1974-06-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6971274A JPS50160181A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-20 1974-06-20

Publications (1)

Publication Number Publication Date
JPS50160181A true JPS50160181A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-12-25

Family

ID=13410710

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6971274A Pending JPS50160181A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-06-20 1974-06-20

Country Status (1)

Country Link
JP (1) JPS50160181A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156185A (en) * 1976-06-21 1977-12-26 Makoto Katsurai Horizontalltype discharge apparatus with cross magnetic field
JPS537585A (en) * 1976-07-10 1978-01-24 Makoto Katsurai Spattering apparatus of horizontalltype discharge with cross magnetic field

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS52156185A (en) * 1976-06-21 1977-12-26 Makoto Katsurai Horizontalltype discharge apparatus with cross magnetic field
JPS537585A (en) * 1976-07-10 1978-01-24 Makoto Katsurai Spattering apparatus of horizontalltype discharge with cross magnetic field

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