JPS50159642A - - Google Patents
Info
- Publication number
- JPS50159642A JPS50159642A JP6671774A JP6671774A JPS50159642A JP S50159642 A JPS50159642 A JP S50159642A JP 6671774 A JP6671774 A JP 6671774A JP 6671774 A JP6671774 A JP 6671774A JP S50159642 A JPS50159642 A JP S50159642A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6671774A JPS5539011B2 (https=) | 1974-06-12 | 1974-06-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6671774A JPS5539011B2 (https=) | 1974-06-12 | 1974-06-12 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50159642A true JPS50159642A (https=) | 1975-12-24 |
| JPS5539011B2 JPS5539011B2 (https=) | 1980-10-08 |
Family
ID=13323925
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6671774A Expired JPS5539011B2 (https=) | 1974-06-12 | 1974-06-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5539011B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6970548B2 (ja) * | 2016-09-09 | 2021-11-24 | キヤノン株式会社 | 照明光学系、露光装置、及び物品製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50110248A (https=) * | 1974-02-06 | 1975-08-30 |
-
1974
- 1974-06-12 JP JP6671774A patent/JPS5539011B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS50110248A (https=) * | 1974-02-06 | 1975-08-30 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5539011B2 (https=) | 1980-10-08 |