JPS50158345A - - Google Patents
Info
- Publication number
- JPS50158345A JPS50158345A JP49065603A JP6560374A JPS50158345A JP S50158345 A JPS50158345 A JP S50158345A JP 49065603 A JP49065603 A JP 49065603A JP 6560374 A JP6560374 A JP 6560374A JP S50158345 A JPS50158345 A JP S50158345A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6560374A JPS5723413B2 (en:Method) | 1974-06-11 | 1974-06-11 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6560374A JPS5723413B2 (en:Method) | 1974-06-11 | 1974-06-11 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50158345A true JPS50158345A (en:Method) | 1975-12-22 |
| JPS5723413B2 JPS5723413B2 (en:Method) | 1982-05-18 |
Family
ID=13291747
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6560374A Expired JPS5723413B2 (en:Method) | 1974-06-11 | 1974-06-11 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5723413B2 (en:Method) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0473766A (ja) * | 1990-07-16 | 1992-03-09 | Toshiba Corp | プロキシミティ露光装置 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0214829U (en:Method) * | 1988-07-13 | 1990-01-30 |
-
1974
- 1974-06-11 JP JP6560374A patent/JPS5723413B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0473766A (ja) * | 1990-07-16 | 1992-03-09 | Toshiba Corp | プロキシミティ露光装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5723413B2 (en:Method) | 1982-05-18 |