JPS50158345A - - Google Patents

Info

Publication number
JPS50158345A
JPS50158345A JP49065603A JP6560374A JPS50158345A JP S50158345 A JPS50158345 A JP S50158345A JP 49065603 A JP49065603 A JP 49065603A JP 6560374 A JP6560374 A JP 6560374A JP S50158345 A JPS50158345 A JP S50158345A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49065603A
Other languages
Japanese (ja)
Other versions
JPS5723413B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6560374A priority Critical patent/JPS5723413B2/ja
Publication of JPS50158345A publication Critical patent/JPS50158345A/ja
Publication of JPS5723413B2 publication Critical patent/JPS5723413B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6560374A 1974-06-11 1974-06-11 Expired JPS5723413B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6560374A JPS5723413B2 (cs) 1974-06-11 1974-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6560374A JPS5723413B2 (cs) 1974-06-11 1974-06-11

Publications (2)

Publication Number Publication Date
JPS50158345A true JPS50158345A (cs) 1975-12-22
JPS5723413B2 JPS5723413B2 (cs) 1982-05-18

Family

ID=13291747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6560374A Expired JPS5723413B2 (cs) 1974-06-11 1974-06-11

Country Status (1)

Country Link
JP (1) JPS5723413B2 (cs)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473766A (ja) * 1990-07-16 1992-03-09 Toshiba Corp プロキシミティ露光装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214829U (cs) * 1988-07-13 1990-01-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473766A (ja) * 1990-07-16 1992-03-09 Toshiba Corp プロキシミティ露光装置

Also Published As

Publication number Publication date
JPS5723413B2 (cs) 1982-05-18

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