JPS50158345A - - Google Patents

Info

Publication number
JPS50158345A
JPS50158345A JP49065603A JP6560374A JPS50158345A JP S50158345 A JPS50158345 A JP S50158345A JP 49065603 A JP49065603 A JP 49065603A JP 6560374 A JP6560374 A JP 6560374A JP S50158345 A JPS50158345 A JP S50158345A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49065603A
Other languages
Japanese (ja)
Other versions
JPS5723413B2 (cg-RX-API-DMAC10.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6560374A priority Critical patent/JPS5723413B2/ja
Publication of JPS50158345A publication Critical patent/JPS50158345A/ja
Publication of JPS5723413B2 publication Critical patent/JPS5723413B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
JP6560374A 1974-06-11 1974-06-11 Expired JPS5723413B2 (cg-RX-API-DMAC10.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6560374A JPS5723413B2 (cg-RX-API-DMAC10.html) 1974-06-11 1974-06-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6560374A JPS5723413B2 (cg-RX-API-DMAC10.html) 1974-06-11 1974-06-11

Publications (2)

Publication Number Publication Date
JPS50158345A true JPS50158345A (cg-RX-API-DMAC10.html) 1975-12-22
JPS5723413B2 JPS5723413B2 (cg-RX-API-DMAC10.html) 1982-05-18

Family

ID=13291747

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6560374A Expired JPS5723413B2 (cg-RX-API-DMAC10.html) 1974-06-11 1974-06-11

Country Status (1)

Country Link
JP (1) JPS5723413B2 (cg-RX-API-DMAC10.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473766A (ja) * 1990-07-16 1992-03-09 Toshiba Corp プロキシミティ露光装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0214829U (cg-RX-API-DMAC10.html) * 1988-07-13 1990-01-30

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0473766A (ja) * 1990-07-16 1992-03-09 Toshiba Corp プロキシミティ露光装置

Also Published As

Publication number Publication date
JPS5723413B2 (cg-RX-API-DMAC10.html) 1982-05-18

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