JPS5015663A - - Google Patents
Info
- Publication number
- JPS5015663A JPS5015663A JP6659473A JP6659473A JPS5015663A JP S5015663 A JPS5015663 A JP S5015663A JP 6659473 A JP6659473 A JP 6659473A JP 6659473 A JP6659473 A JP 6659473A JP S5015663 A JPS5015663 A JP S5015663A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6659473A JPS5316747B2 (de) | 1973-06-13 | 1973-06-13 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP6659473A JPS5316747B2 (de) | 1973-06-13 | 1973-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5015663A true JPS5015663A (de) | 1975-02-19 |
| JPS5316747B2 JPS5316747B2 (de) | 1978-06-03 |
Family
ID=13320400
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP6659473A Expired JPS5316747B2 (de) | 1973-06-13 | 1973-06-13 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5316747B2 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543125U (de) * | 1978-09-16 | 1980-03-21 | ||
| US4732841A (en) * | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
-
1973
- 1973-06-13 JP JP6659473A patent/JPS5316747B2/ja not_active Expired
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5543125U (de) * | 1978-09-16 | 1980-03-21 | ||
| JPS5815693Y2 (ja) * | 1978-09-16 | 1983-03-30 | 荒川車体工業株式会社 | コイルスプリングの固定装置 |
| US4732841A (en) * | 1986-03-24 | 1988-03-22 | Fairchild Semiconductor Corporation | Tri-level resist process for fine resolution photolithography |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5316747B2 (de) | 1978-06-03 |