JPS50155064A - - Google Patents

Info

Publication number
JPS50155064A
JPS50155064A JP49061524A JP6152474A JPS50155064A JP S50155064 A JPS50155064 A JP S50155064A JP 49061524 A JP49061524 A JP 49061524A JP 6152474 A JP6152474 A JP 6152474A JP S50155064 A JPS50155064 A JP S50155064A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP49061524A
Other languages
Japanese (ja)
Other versions
JPS533584B2 (cs
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP6152474A priority Critical patent/JPS533584B2/ja
Publication of JPS50155064A publication Critical patent/JPS50155064A/ja
Publication of JPS533584B2 publication Critical patent/JPS533584B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Cleaning In General (AREA)
JP6152474A 1974-05-31 1974-05-31 Expired JPS533584B2 (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6152474A JPS533584B2 (cs) 1974-05-31 1974-05-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6152474A JPS533584B2 (cs) 1974-05-31 1974-05-31

Publications (2)

Publication Number Publication Date
JPS50155064A true JPS50155064A (cs) 1975-12-13
JPS533584B2 JPS533584B2 (cs) 1978-02-08

Family

ID=13173560

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6152474A Expired JPS533584B2 (cs) 1974-05-31 1974-05-31

Country Status (1)

Country Link
JP (1) JPS533584B2 (cs)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372379A (en) * 1976-12-09 1978-06-27 Kawasaki Steel Corp Method of removing scale attached to the inside wall of water pipe
JPH028592U (cs) * 1988-06-30 1990-01-19

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6697055B2 (ja) * 2018-11-30 2020-05-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理装置の配管洗浄方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5372379A (en) * 1976-12-09 1978-06-27 Kawasaki Steel Corp Method of removing scale attached to the inside wall of water pipe
JPH028592U (cs) * 1988-06-30 1990-01-19

Also Published As

Publication number Publication date
JPS533584B2 (cs) 1978-02-08

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