JPS50153581A - - Google Patents

Info

Publication number
JPS50153581A
JPS50153581A JP5965274A JP5965274A JPS50153581A JP S50153581 A JPS50153581 A JP S50153581A JP 5965274 A JP5965274 A JP 5965274A JP 5965274 A JP5965274 A JP 5965274A JP S50153581 A JPS50153581 A JP S50153581A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5965274A
Other languages
Japanese (ja)
Other versions
JPS5724565B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5965274A priority Critical patent/JPS5724565B2/ja
Publication of JPS50153581A publication Critical patent/JPS50153581A/ja
Publication of JPS5724565B2 publication Critical patent/JPS5724565B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Wire Bonding (AREA)
  • Control Of Position Or Direction (AREA)
JP5965274A 1974-05-29 1974-05-29 Expired JPS5724565B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5965274A JPS5724565B2 (enrdf_load_stackoverflow) 1974-05-29 1974-05-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5965274A JPS5724565B2 (enrdf_load_stackoverflow) 1974-05-29 1974-05-29

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP961183A Division JPS58139436A (ja) 1983-01-24 1983-01-24 平面移動装置用マニピユレ−タ

Publications (2)

Publication Number Publication Date
JPS50153581A true JPS50153581A (enrdf_load_stackoverflow) 1975-12-10
JPS5724565B2 JPS5724565B2 (enrdf_load_stackoverflow) 1982-05-25

Family

ID=13119335

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5965274A Expired JPS5724565B2 (enrdf_load_stackoverflow) 1974-05-29 1974-05-29

Country Status (1)

Country Link
JP (1) JPS5724565B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57160136A (en) * 1981-03-28 1982-10-02 Shinkawa Ltd Manipulator in planar movement system for semiconductor device

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4310557Y1 (enrdf_load_stackoverflow) * 1966-08-12 1968-05-08
JPS4926691A (enrdf_load_stackoverflow) * 1972-07-05 1974-03-09
JPS4977181A (enrdf_load_stackoverflow) * 1972-10-30 1974-07-25

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4310557Y1 (enrdf_load_stackoverflow) * 1966-08-12 1968-05-08
JPS4926691A (enrdf_load_stackoverflow) * 1972-07-05 1974-03-09
JPS4977181A (enrdf_load_stackoverflow) * 1972-10-30 1974-07-25

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57160136A (en) * 1981-03-28 1982-10-02 Shinkawa Ltd Manipulator in planar movement system for semiconductor device

Also Published As

Publication number Publication date
JPS5724565B2 (enrdf_load_stackoverflow) 1982-05-25

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