JPS5014997B2 - - Google Patents
Info
- Publication number
- JPS5014997B2 JPS5014997B2 JP8826271A JP8826271A JPS5014997B2 JP S5014997 B2 JPS5014997 B2 JP S5014997B2 JP 8826271 A JP8826271 A JP 8826271A JP 8826271 A JP8826271 A JP 8826271A JP S5014997 B2 JPS5014997 B2 JP S5014997B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8826271A JPS5014997B2 (https=) | 1971-11-08 | 1971-11-08 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP8826271A JPS5014997B2 (https=) | 1971-11-08 | 1971-11-08 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS4852683A JPS4852683A (https=) | 1973-07-24 |
| JPS5014997B2 true JPS5014997B2 (https=) | 1975-05-31 |
Family
ID=13937952
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP8826271A Expired JPS5014997B2 (https=) | 1971-11-08 | 1971-11-08 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5014997B2 (https=) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57168262U (https=) * | 1981-04-16 | 1982-10-23 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58696Y2 (ja) * | 1978-08-07 | 1983-01-07 | 株式会社徳田製作所 | 試料処理装置 |
| JPH0623563Y2 (ja) * | 1984-08-25 | 1994-06-22 | 株式会社島津製作所 | 処理物の移送装置 |
-
1971
- 1971-11-08 JP JP8826271A patent/JPS5014997B2/ja not_active Expired
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57168262U (https=) * | 1981-04-16 | 1982-10-23 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS4852683A (https=) | 1973-07-24 |