JPS50149591A - - Google Patents

Info

Publication number
JPS50149591A
JPS50149591A JP5826774A JP5826774A JPS50149591A JP S50149591 A JPS50149591 A JP S50149591A JP 5826774 A JP5826774 A JP 5826774A JP 5826774 A JP5826774 A JP 5826774A JP S50149591 A JPS50149591 A JP S50149591A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5826774A
Other languages
Japanese (ja)
Other versions
JPS571586B2 (ko
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5826774A priority Critical patent/JPS571586B2/ja
Publication of JPS50149591A publication Critical patent/JPS50149591A/ja
Publication of JPS571586B2 publication Critical patent/JPS571586B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP5826774A 1974-05-22 1974-05-22 Expired JPS571586B2 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5826774A JPS571586B2 (ko) 1974-05-22 1974-05-22

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5826774A JPS571586B2 (ko) 1974-05-22 1974-05-22

Publications (2)

Publication Number Publication Date
JPS50149591A true JPS50149591A (ko) 1975-11-29
JPS571586B2 JPS571586B2 (ko) 1982-01-12

Family

ID=13079380

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5826774A Expired JPS571586B2 (ko) 1974-05-22 1974-05-22

Country Status (1)

Country Link
JP (1) JPS571586B2 (ko)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014278A1 (ja) * 2015-07-21 2017-01-26 住友重機械工業株式会社 成膜装置
JP2017025407A (ja) * 2015-07-21 2017-02-02 住友重機械工業株式会社 成膜装置

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (ko) * 1972-07-29 1974-03-28
JPS5062181A (ko) * 1973-10-05 1975-05-28

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS4933890A (ko) * 1972-07-29 1974-03-28
JPS5062181A (ko) * 1973-10-05 1975-05-28

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2017014278A1 (ja) * 2015-07-21 2017-01-26 住友重機械工業株式会社 成膜装置
JP2017025407A (ja) * 2015-07-21 2017-02-02 住友重機械工業株式会社 成膜装置
CN107849690A (zh) * 2015-07-21 2018-03-27 住友重机械工业株式会社 成膜装置
KR20180034463A (ko) * 2015-07-21 2018-04-04 스미도모쥬기가이고교 가부시키가이샤 성막장치
KR20200032276A (ko) * 2015-07-21 2020-03-25 스미도모쥬기가이고교 가부시키가이샤 음이온생성장치
KR20230129601A (ko) * 2015-07-21 2023-09-08 스미도모쥬기가이고교 가부시키가이샤 음이온생성장치

Also Published As

Publication number Publication date
JPS571586B2 (ko) 1982-01-12

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