JPS50149591A - - Google Patents
Info
- Publication number
- JPS50149591A JPS50149591A JP5826774A JP5826774A JPS50149591A JP S50149591 A JPS50149591 A JP S50149591A JP 5826774 A JP5826774 A JP 5826774A JP 5826774 A JP5826774 A JP 5826774A JP S50149591 A JPS50149591 A JP S50149591A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5826774A JPS571586B2 (https=) | 1974-05-22 | 1974-05-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5826774A JPS571586B2 (https=) | 1974-05-22 | 1974-05-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50149591A true JPS50149591A (https=) | 1975-11-29 |
| JPS571586B2 JPS571586B2 (https=) | 1982-01-12 |
Family
ID=13079380
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5826774A Expired JPS571586B2 (https=) | 1974-05-22 | 1974-05-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS571586B2 (https=) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017014278A1 (ja) * | 2015-07-21 | 2017-01-26 | 住友重機械工業株式会社 | 成膜装置 |
| JP2017025407A (ja) * | 2015-07-21 | 2017-02-02 | 住友重機械工業株式会社 | 成膜装置 |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933890A (https=) * | 1972-07-29 | 1974-03-28 | ||
| JPS5062181A (https=) * | 1973-10-05 | 1975-05-28 |
-
1974
- 1974-05-22 JP JP5826774A patent/JPS571586B2/ja not_active Expired
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4933890A (https=) * | 1972-07-29 | 1974-03-28 | ||
| JPS5062181A (https=) * | 1973-10-05 | 1975-05-28 |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2017014278A1 (ja) * | 2015-07-21 | 2017-01-26 | 住友重機械工業株式会社 | 成膜装置 |
| JP2017025407A (ja) * | 2015-07-21 | 2017-02-02 | 住友重機械工業株式会社 | 成膜装置 |
| CN107849690A (zh) * | 2015-07-21 | 2018-03-27 | 住友重机械工业株式会社 | 成膜装置 |
| KR20180034463A (ko) * | 2015-07-21 | 2018-04-04 | 스미도모쥬기가이고교 가부시키가이샤 | 성막장치 |
| KR20200032276A (ko) * | 2015-07-21 | 2020-03-25 | 스미도모쥬기가이고교 가부시키가이샤 | 음이온생성장치 |
| KR20230129601A (ko) * | 2015-07-21 | 2023-09-08 | 스미도모쥬기가이고교 가부시키가이샤 | 음이온생성장치 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS571586B2 (https=) | 1982-01-12 |