JPS50148916A - - Google Patents

Info

Publication number
JPS50148916A
JPS50148916A JP5553874A JP5553874A JPS50148916A JP S50148916 A JPS50148916 A JP S50148916A JP 5553874 A JP5553874 A JP 5553874A JP 5553874 A JP5553874 A JP 5553874A JP S50148916 A JPS50148916 A JP S50148916A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5553874A
Other languages
Japanese (ja)
Other versions
JPS5529269B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5553874A priority Critical patent/JPS5529269B2/ja
Publication of JPS50148916A publication Critical patent/JPS50148916A/ja
Publication of JPS5529269B2 publication Critical patent/JPS5529269B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP5553874A 1974-05-20 1974-05-20 Expired JPS5529269B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5553874A JPS5529269B2 (enrdf_load_stackoverflow) 1974-05-20 1974-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5553874A JPS5529269B2 (enrdf_load_stackoverflow) 1974-05-20 1974-05-20

Publications (2)

Publication Number Publication Date
JPS50148916A true JPS50148916A (enrdf_load_stackoverflow) 1975-11-28
JPS5529269B2 JPS5529269B2 (enrdf_load_stackoverflow) 1980-08-02

Family

ID=13001486

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5553874A Expired JPS5529269B2 (enrdf_load_stackoverflow) 1974-05-20 1974-05-20

Country Status (1)

Country Link
JP (1) JPS5529269B2 (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967590U (ja) * 1982-10-27 1984-05-08 松下電子工業株式会社 高真空排気装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5967590U (ja) * 1982-10-27 1984-05-08 松下電子工業株式会社 高真空排気装置

Also Published As

Publication number Publication date
JPS5529269B2 (enrdf_load_stackoverflow) 1980-08-02

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