JPS50147877A - - Google Patents

Info

Publication number
JPS50147877A
JPS50147877A JP5108574A JP5108574A JPS50147877A JP S50147877 A JPS50147877 A JP S50147877A JP 5108574 A JP5108574 A JP 5108574A JP 5108574 A JP5108574 A JP 5108574A JP S50147877 A JPS50147877 A JP S50147877A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5108574A
Other languages
Japanese (ja)
Other versions
JPS5733700B2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5108574A priority Critical patent/JPS5733700B2/ja
Publication of JPS50147877A publication Critical patent/JPS50147877A/ja
Publication of JPS5733700B2 publication Critical patent/JPS5733700B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Formation Of Insulating Films (AREA)
JP5108574A 1974-05-08 1974-05-08 Expired JPS5733700B2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5108574A JPS5733700B2 (enrdf_load_stackoverflow) 1974-05-08 1974-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5108574A JPS5733700B2 (enrdf_load_stackoverflow) 1974-05-08 1974-05-08

Publications (2)

Publication Number Publication Date
JPS50147877A true JPS50147877A (enrdf_load_stackoverflow) 1975-11-27
JPS5733700B2 JPS5733700B2 (enrdf_load_stackoverflow) 1982-07-19

Family

ID=12876966

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5108574A Expired JPS5733700B2 (enrdf_load_stackoverflow) 1974-05-08 1974-05-08

Country Status (1)

Country Link
JP (1) JPS5733700B2 (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633819A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Preparation of semiconductor device
JPS58106873A (ja) * 1981-12-18 1983-06-25 Seiko Epson Corp 半導体装置の製造方法
JP2002329721A (ja) * 2001-04-26 2002-11-15 Tokyo Electron Ltd 半導体装置の製造方法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633819A (en) * 1979-08-29 1981-04-04 Fujitsu Ltd Preparation of semiconductor device
JPS58106873A (ja) * 1981-12-18 1983-06-25 Seiko Epson Corp 半導体装置の製造方法
JP2002329721A (ja) * 2001-04-26 2002-11-15 Tokyo Electron Ltd 半導体装置の製造方法

Also Published As

Publication number Publication date
JPS5733700B2 (enrdf_load_stackoverflow) 1982-07-19

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