JPS50147287A - - Google Patents
Info
- Publication number
- JPS50147287A JPS50147287A JP5343474A JP5343474A JPS50147287A JP S50147287 A JPS50147287 A JP S50147287A JP 5343474 A JP5343474 A JP 5343474A JP 5343474 A JP5343474 A JP 5343474A JP S50147287 A JPS50147287 A JP S50147287A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5343474A JPS50147287A (fr) | 1974-05-15 | 1974-05-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5343474A JPS50147287A (fr) | 1974-05-15 | 1974-05-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS50147287A true JPS50147287A (fr) | 1975-11-26 |
Family
ID=12942725
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5343474A Pending JPS50147287A (fr) | 1974-05-15 | 1974-05-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS50147287A (fr) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117060A (en) * | 1976-03-25 | 1977-10-01 | Ibm | Method of cleaning silicon wafers |
| US5039349A (en) * | 1990-05-18 | 1991-08-13 | Veriflo Corporation | Method and apparatus for cleaning surfaces to absolute or near-absolute cleanliness |
| JPH03201533A (ja) * | 1989-12-28 | 1991-09-03 | Toyota Central Res & Dev Lab Inc | シリコンの異方性エッチング液 |
| JP2013518179A (ja) * | 2010-01-26 | 2013-05-20 | ウエスチングハウス・エレクトリック・カンパニー・エルエルシー | 堆積物を除去する方法及び組成物 |
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1974
- 1974-05-15 JP JP5343474A patent/JPS50147287A/ja active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52117060A (en) * | 1976-03-25 | 1977-10-01 | Ibm | Method of cleaning silicon wafers |
| JPS542539B2 (fr) * | 1976-03-25 | 1979-02-08 | ||
| JPH03201533A (ja) * | 1989-12-28 | 1991-09-03 | Toyota Central Res & Dev Lab Inc | シリコンの異方性エッチング液 |
| US5039349A (en) * | 1990-05-18 | 1991-08-13 | Veriflo Corporation | Method and apparatus for cleaning surfaces to absolute or near-absolute cleanliness |
| JP2013518179A (ja) * | 2010-01-26 | 2013-05-20 | ウエスチングハウス・エレクトリック・カンパニー・エルエルシー | 堆積物を除去する方法及び組成物 |