JPS50146478U - - Google Patents

Info

Publication number
JPS50146478U
JPS50146478U JP1974057927U JP5792774U JPS50146478U JP S50146478 U JPS50146478 U JP S50146478U JP 1974057927 U JP1974057927 U JP 1974057927U JP 5792774 U JP5792774 U JP 5792774U JP S50146478 U JPS50146478 U JP S50146478U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1974057927U
Other languages
Japanese (ja)
Other versions
JPS5527241Y2 (enExample
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1974057927U priority Critical patent/JPS5527241Y2/ja
Publication of JPS50146478U publication Critical patent/JPS50146478U/ja
Application granted granted Critical
Publication of JPS5527241Y2 publication Critical patent/JPS5527241Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP1974057927U 1974-05-20 1974-05-20 Expired JPS5527241Y2 (enExample)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1974057927U JPS5527241Y2 (enExample) 1974-05-20 1974-05-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1974057927U JPS5527241Y2 (enExample) 1974-05-20 1974-05-20

Publications (2)

Publication Number Publication Date
JPS50146478U true JPS50146478U (enExample) 1975-12-04
JPS5527241Y2 JPS5527241Y2 (enExample) 1980-06-30

Family

ID=28214611

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1974057927U Expired JPS5527241Y2 (enExample) 1974-05-20 1974-05-20

Country Status (1)

Country Link
JP (1) JPS5527241Y2 (enExample)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147112A (ja) * 1982-02-26 1983-09-01 Fujitsu Ltd 結晶成長装置
JP2023001766A (ja) * 2021-06-21 2023-01-06 パナソニックホールディングス株式会社 Iii族化合物半導体結晶の製造装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58147112A (ja) * 1982-02-26 1983-09-01 Fujitsu Ltd 結晶成長装置
JP2023001766A (ja) * 2021-06-21 2023-01-06 パナソニックホールディングス株式会社 Iii族化合物半導体結晶の製造装置

Also Published As

Publication number Publication date
JPS5527241Y2 (enExample) 1980-06-30

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