JPS50145094A - - Google Patents
Info
- Publication number
- JPS50145094A JPS50145094A JP5181674A JP5181674A JPS50145094A JP S50145094 A JPS50145094 A JP S50145094A JP 5181674 A JP5181674 A JP 5181674A JP 5181674 A JP5181674 A JP 5181674A JP S50145094 A JPS50145094 A JP S50145094A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
- Weting (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5181674A JPS5632777B2 (ja�@�@) | 1974-05-10 | 1974-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5181674A JPS5632777B2 (ja�@�@) | 1974-05-10 | 1974-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50145094A true JPS50145094A (ja�@�@) | 1975-11-21 |
| JPS5632777B2 JPS5632777B2 (ja�@�@) | 1981-07-30 |
Family
ID=12897412
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5181674A Expired JPS5632777B2 (ja�@�@) | 1974-05-10 | 1974-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5632777B2 (ja�@�@) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58202549A (ja) * | 1982-02-19 | 1983-11-25 | ラサレイ・ポ−ルディング・アクチェンゲゼルシャフト | モノリシツク集積半導体デバイスの導電領域形成方法とこの方法で作製した高集積密度の半導体デバイス |
| JP2014157869A (ja) * | 2013-02-14 | 2014-08-28 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4847284A (ja�@�@) * | 1971-10-08 | 1973-07-05 |
-
1974
- 1974-05-10 JP JP5181674A patent/JPS5632777B2/ja not_active Expired
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS4847284A (ja�@�@) * | 1971-10-08 | 1973-07-05 |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58202549A (ja) * | 1982-02-19 | 1983-11-25 | ラサレイ・ポ−ルディング・アクチェンゲゼルシャフト | モノリシツク集積半導体デバイスの導電領域形成方法とこの方法で作製した高集積密度の半導体デバイス |
| JP2014157869A (ja) * | 2013-02-14 | 2014-08-28 | Fujitsu Semiconductor Ltd | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5632777B2 (ja�@�@) | 1981-07-30 |