JPS50145077A - - Google Patents
Info
- Publication number
- JPS50145077A JPS50145077A JP5190874A JP5190874A JPS50145077A JP S50145077 A JPS50145077 A JP S50145077A JP 5190874 A JP5190874 A JP 5190874A JP 5190874 A JP5190874 A JP 5190874A JP S50145077 A JPS50145077 A JP S50145077A
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5190874A JPS5756769B2 (enExample) | 1974-05-10 | 1974-05-10 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP5190874A JPS5756769B2 (enExample) | 1974-05-10 | 1974-05-10 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS50145077A true JPS50145077A (enExample) | 1975-11-21 |
| JPS5756769B2 JPS5756769B2 (enExample) | 1982-12-01 |
Family
ID=12899964
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP5190874A Expired JPS5756769B2 (enExample) | 1974-05-10 | 1974-05-10 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5756769B2 (enExample) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5521193A (en) * | 1978-11-24 | 1980-02-15 | Hitachi Ltd | Wafer processing device |
| JPS5521119A (en) * | 1978-08-02 | 1980-02-15 | Hitachi Ltd | Wafer continuously processing apparatus |
| JPS55147773U (enExample) * | 1979-04-11 | 1980-10-23 | ||
| JPS5932146A (ja) * | 1982-08-18 | 1984-02-21 | Nec Corp | 半導体ウエハ−の検査装置 |
| JPS59200434A (ja) * | 1983-04-28 | 1984-11-13 | Hitachi Electronics Eng Co Ltd | Ｃｖｄ装置の試料台の取りつけ取り外し機構 |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS60102251U (ja) * | 1983-12-14 | 1985-07-12 | 日本電気株式会社 | 気相成長装置 |
| JPS60238136A (ja) * | 1984-05-10 | 1985-11-27 | Agency Of Ind Science & Technol | 昇華性物質ガスの安定供給方法 |
-
1974
- 1974-05-10 JP JP5190874A patent/JPS5756769B2/ja not_active Expired
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5521119A (en) * | 1978-08-02 | 1980-02-15 | Hitachi Ltd | Wafer continuously processing apparatus |
| JPS5521193A (en) * | 1978-11-24 | 1980-02-15 | Hitachi Ltd | Wafer processing device |
| JPS55147773U (enExample) * | 1979-04-11 | 1980-10-23 | ||
| JPS5932146A (ja) * | 1982-08-18 | 1984-02-21 | Nec Corp | 半導体ウエハ−の検査装置 |
| JPS59200434A (ja) * | 1983-04-28 | 1984-11-13 | Hitachi Electronics Eng Co Ltd | Ｃｖｄ装置の試料台の取りつけ取り外し機構 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5756769B2 (enExample) | 1982-12-01 |