JPS50145077A - - Google Patents

Info

Publication number
JPS50145077A
JPS50145077A JP5190874A JP5190874A JPS50145077A JP S50145077 A JPS50145077 A JP S50145077A JP 5190874 A JP5190874 A JP 5190874A JP 5190874 A JP5190874 A JP 5190874A JP S50145077 A JPS50145077 A JP S50145077A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5190874A
Other languages
Japanese (ja)
Other versions
JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5190874A priority Critical patent/JPS5756769B2/ja
Publication of JPS50145077A publication Critical patent/JPS50145077A/ja
Publication of JPS5756769B2 publication Critical patent/JPS5756769B2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5190874A 1974-05-10 1974-05-10 Expired JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5190874A JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-10 1974-05-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5190874A JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-10 1974-05-10

Publications (2)

Publication Number Publication Date
JPS50145077A true JPS50145077A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1975-11-21
JPS5756769B2 JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-12-01

Family

ID=12899964

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5190874A Expired JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1974-05-10 1974-05-10

Country Status (1)

Country Link
JP (1) JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521193A (en) * 1978-11-24 1980-02-15 Hitachi Ltd Wafer processing device
JPS5521119A (en) * 1978-08-02 1980-02-15 Hitachi Ltd Wafer continuously processing apparatus
JPS55147773U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-04-11 1980-10-23
JPS5932146A (ja) * 1982-08-18 1984-02-21 Nec Corp 半導体ウエハ−の検査装置
JPS59200434A (ja) * 1983-04-28 1984-11-13 Hitachi Electronics Eng Co Ltd Cvd装置の試料台の取りつけ取り外し機構

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60102251U (ja) * 1983-12-14 1985-07-12 日本電気株式会社 気相成長装置
JPS60238136A (ja) * 1984-05-10 1985-11-27 Agency Of Ind Science & Technol 昇華性物質ガスの安定供給方法

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521119A (en) * 1978-08-02 1980-02-15 Hitachi Ltd Wafer continuously processing apparatus
JPS5521193A (en) * 1978-11-24 1980-02-15 Hitachi Ltd Wafer processing device
JPS55147773U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * 1979-04-11 1980-10-23
JPS5932146A (ja) * 1982-08-18 1984-02-21 Nec Corp 半導体ウエハ−の検査装置
JPS59200434A (ja) * 1983-04-28 1984-11-13 Hitachi Electronics Eng Co Ltd Cvd装置の試料台の取りつけ取り外し機構

Also Published As

Publication number Publication date
JPS5756769B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1982-12-01

Similar Documents

Publication Publication Date Title
AU495898B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU6599874A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU7205174A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DD108935A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU481441A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU479624A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU479769A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU480578A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU480701A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU480879A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU480922A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU481001A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU481220A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DD109890A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU481898A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU482208A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU482332A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
AU482365A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BE836268A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BE836983A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG19453A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG19725A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG19837A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG19872A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
BG19873A1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)