JPS50143590A - - Google Patents

Info

Publication number
JPS50143590A
JPS50143590A JP5023174A JP5023174A JPS50143590A JP S50143590 A JPS50143590 A JP S50143590A JP 5023174 A JP5023174 A JP 5023174A JP 5023174 A JP5023174 A JP 5023174A JP S50143590 A JPS50143590 A JP S50143590A
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP5023174A
Other languages
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5023174A priority Critical patent/JPS50143590A/ja
Publication of JPS50143590A publication Critical patent/JPS50143590A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
JP5023174A 1974-05-08 1974-05-08 Pending JPS50143590A (cs)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5023174A JPS50143590A (cs) 1974-05-08 1974-05-08

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5023174A JPS50143590A (cs) 1974-05-08 1974-05-08

Publications (1)

Publication Number Publication Date
JPS50143590A true JPS50143590A (cs) 1975-11-19

Family

ID=12853235

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5023174A Pending JPS50143590A (cs) 1974-05-08 1974-05-08

Country Status (1)

Country Link
JP (1) JPS50143590A (cs)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594147A (en) * 1979-01-12 1980-07-17 Kobe Steel Ltd Method of discriminating surface flaw of high temperature material to be detected
JPS5694248A (en) * 1979-12-28 1981-07-30 Fujitsu Ltd Detector for foreign matter on surface
JPS5911638A (ja) * 1982-07-12 1984-01-21 Hitachi Ltd パタ−ン欠陥検出装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5594147A (en) * 1979-01-12 1980-07-17 Kobe Steel Ltd Method of discriminating surface flaw of high temperature material to be detected
JPS5694248A (en) * 1979-12-28 1981-07-30 Fujitsu Ltd Detector for foreign matter on surface
JPS5911638A (ja) * 1982-07-12 1984-01-21 Hitachi Ltd パタ−ン欠陥検出装置

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