JPS50143466U - - Google Patents

Info

Publication number
JPS50143466U
JPS50143466U JP5350474U JP5350474U JPS50143466U JP S50143466 U JPS50143466 U JP S50143466U JP 5350474 U JP5350474 U JP 5350474U JP 5350474 U JP5350474 U JP 5350474U JP S50143466 U JPS50143466 U JP S50143466U
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5350474U
Other languages
Japanese (ja)
Other versions
JPS5543663Y2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5350474U priority Critical patent/JPS5543663Y2/ja
Publication of JPS50143466U publication Critical patent/JPS50143466U/ja
Application granted granted Critical
Publication of JPS5543663Y2 publication Critical patent/JPS5543663Y2/ja
Expired legal-status Critical Current

Links

JP5350474U 1974-05-11 1974-05-11 Expired JPS5543663Y2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5350474U JPS5543663Y2 (en) 1974-05-11 1974-05-11

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5350474U JPS5543663Y2 (en) 1974-05-11 1974-05-11

Publications (2)

Publication Number Publication Date
JPS50143466U true JPS50143466U (en) 1975-11-27
JPS5543663Y2 JPS5543663Y2 (en) 1980-10-14

Family

ID=28202363

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5350474U Expired JPS5543663Y2 (en) 1974-05-11 1974-05-11

Country Status (1)

Country Link
JP (1) JPS5543663Y2 (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01149354A (en) * 1987-12-04 1989-06-12 Hitachi Ltd Electron microscope
JP2012009247A (en) * 2010-06-24 2012-01-12 Topcon Corp Electron microscope system
JP2012138324A (en) * 2010-12-28 2012-07-19 Topcon Corp Secondary electron detector and charge particle beam apparatus
JP2013191576A (en) * 2013-05-13 2013-09-26 Horiba Ltd Electron microscope device
WO2013168488A1 (en) * 2012-05-11 2013-11-14 株式会社 日立ハイテクノロジーズ Charged particle beam microscope
JP2019133787A (en) * 2018-01-30 2019-08-08 日本電子株式会社 Charged particle beam device

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01149354A (en) * 1987-12-04 1989-06-12 Hitachi Ltd Electron microscope
JP2012009247A (en) * 2010-06-24 2012-01-12 Topcon Corp Electron microscope system
JP2012138324A (en) * 2010-12-28 2012-07-19 Topcon Corp Secondary electron detector and charge particle beam apparatus
WO2013168488A1 (en) * 2012-05-11 2013-11-14 株式会社 日立ハイテクノロジーズ Charged particle beam microscope
JP2013191576A (en) * 2013-05-13 2013-09-26 Horiba Ltd Electron microscope device
JP2019133787A (en) * 2018-01-30 2019-08-08 日本電子株式会社 Charged particle beam device

Also Published As

Publication number Publication date
JPS5543663Y2 (en) 1980-10-14

Similar Documents

Publication Publication Date Title
FR2269369A1 (en)
JPS50102965A (en)
AR199810A1 (en)
AU481101A (en)
AU481663A (en)
BG19668A1 (en)
BG19764A1 (en)
BG20660A1 (en)
BG20668A2 (en)
BG20937A1 (en)
BG20947A1 (en)
BG20994A1 (en)
BG21067A1 (en)
BG21312A1 (en)
BG21341A1 (en)
BG21690A2 (en)
BG21760A1 (en)
BG22061A3 (en)
BG22084A3 (en)
BG22667A1 (en)
BG26365A3 (en)
CH1378974A4 (en)
CH1666774A4 (en)
CH532175A4 (en)
CH564999A5 (en)